Diffusion Morning Report 06/07/04

ted berg tberg at snf.stanford.edu
Mon Jun 7 07:19:47 PDT 2004

Good Morning Alll,
    Looking Ok this morning.  Burn box pressure was high this 
morning-cleaning.  Epi HCl cylinder change this morning. Several nitride 
with no problems on flows.  LTO run with no problems.  Still issues with 
Tylan 1 and 2 uniformity??  TEOS 2 has run several runs with no problems-
testing continues.  Everything else seems to be OK.

Diffusion 	Date: 	6/7/2004 	 
Tube Name/Number 	Status 	Comments 	THICKNESS-Change at
Tylan 1 	yellow 	bad uniformity-bearings changed 	 
Tylan 2 	Up 	bad uniformity baffle changed 	 
Tylan 3 	Up 	  	 
Tylan 4 	Up 	  	 
Tylan 5-BBr3 	Up 	  	 
Tylan 6-POCl3 	Up 	  	 
Tylan 7-TEOS2 	down 	Qual testing-recipe issues resolved 	 
Tylan 8-SiGe 	Up 	  	6.95/30
Tylan 9-Poly 	Up 	  	3.8/30
Tylan 10-Nitride 	yellow 	Particles? 	15.4/30
Tylan 11-BPSG-LTO 	yellow 	Low dep rate? 	10.0/30
Tylan 12-FGA 	Up 	  	 
Tystar 	Up 	  	13.25/30
Doped Poly 	GONE 	  	 
TEOS 	yellow 	 running 	 
Tylan 16 	N/A 	  	 
Burn Box 	Up 	cleaned this morning- 	 
ZYGO 	Up 	  	 
GAAS 22 	UP 	  	 
GAAS 23 	UP 	  	 
SiH4 for furnaces 	  	Auto changeover working well 	A on line 460 PSI

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