Diffusion Morning Report 06/10/04

ted berg tberg at snf.stanford.edu
Thu Jun 10 06:49:13 PDT 2004


Good Morning All,
    Looking pretty good this morning.  Another long run in Nitride-burn 
box very positive so we are cleaning it this morning.  A problem
was recorded not able to run pump program on nitride-ran pump program 
fine leak rate 6mT/ min base 11 mT. cxould not duplicate
problem.  TEOS 2 testing ongoing.  Everything else seems fine for now.

Diffusion 	Date: 	6/10/2004 	 
Tube Name/Number 	Status 	Comments 	THICKNESS-Change at
Tylan 1 	Up 	  	 
Tylan 2 	Up 	  	 
Tylan 3 	Up 	  	 
Tylan 4 	Up 	  	 
Tylan 5-BBr3 	Up 	  	 
Tylan 6-POCl3 	Up 	  	 
Tylan 7-TEOS2 	down 	Qual testing-recipe issues 	 
Tylan 8-SiGe 	Up 	  	6.95/30
Tylan 9-Poly 	Up 	  	3.8/30
Tylan 10-Nitride 	yellow 	Particles? 	19.08/30
Tylan 11-BPSG-LTO 	Up 	  	12.54/30
Tylan 12-FGA 	Up 	  	 
Tystar 	Up 	  	13.25/30
Doped Poly 	GONE 	  	 
TEOS 	yellow 	 running 	 
Tylan 16 	N/A 	  	 
Burn Box 	Up 	High pressure cleaned this morning 	 
ZYGO 	Up 	  	 
  	  	  	 
GAAS 22 	UP 	  	 
GAAS 23 	UP 	  	 
  	  	  	 
SiH4 for furnaces 	  	Auto changeover working well 	A on line 460 PSI


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