Diffusion Morning Report 06/16/04

ted berg tberg at snf.stanford.edu
Wed Jun 16 07:23:25 PDT 2004

Good Morning  All,
    Looking pretty good this morning. Nitride is still under 
observation. LTO has possible contamination. TYstar will not pump 
TEOS2 is testing.  Tylan 1 checked out -loader worked fine.  Everything 
else seems to be ok.

Diffusion 	Date: 	6/16/2004 	 
Tube Name/Number 	Status 	Comments 	THICKNESS-Change at
Tylan 1 	Up 	  	 
Tylan 2 	Up 	  	 
Tylan 3 	Up 	  	 
Tylan 4 	Up 	  	 
Tylan 5-BBr3 	Up 	  	 
Tylan 6-POCl3 	Up 	  	 
Tylan 7-TEOS2 	down 	Qual testing-recipe issues 	 
Tylan 8-SiGe 	Up 	  	7.29/30
Tylan 9-Poly 	Up 	  	5.53/30
Tylan 10-Nitride 	yellow 	Particles? 	19.7/30
Tylan 11-BPSG-LTO 	yellow 	Possible contamination 	16.5/30
Tylan 12-FGA 	Up 	  	 
Tystar 	down 	will not pump down 	13.5/30
Doped Poly 	GONE 	  	 
TEOS 	yellow 	 running 	 
Tylan 16 	N/A 	  	 
Burn Box 	Up 	  	 
ZYGO 	Up 	  	 
GAAS 22 	UP 	  	 
GAAS 23 	UP 	  	 
SiH4 for furnaces 	  	Auto changeover working well 	A on line 440 PSI

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