Diffusion Morning report 06/17/04

ted berg tberg at snf.stanford.edu
Thu Jun 17 06:57:24 PDT 2004

Good Morning All,
    Looking pretty good this morning.  Nitride under observation.  TEOS 
2 testing.  Tylan 4 has a door interlock display issue-looking into it.
Everything else seems to be OK.

Diffusion 	Date: 	6/17/2004 	 
Tube Name/Number 	Status 	Comments 	THICKNESS-Change at
Tylan 1 	Up 	  	 
Tylan 2 	Up 	  	 
Tylan 3 	Up 	  	 
Tylan 4 	yellow
	Door interlock display issue
Tylan 5-BBr3 	Up 	  	 
Tylan 6-POCl3 	Up 	  	 
Tylan 7-TEOS2 	down 	Qual testing-recipe issues 	 
Tylan 8-SiGe 	Up 	  	7.83/30
Tylan 9-Poly 	Up 	  	5.53/30
Tylan 10-Nitride 	yellow 	Particles? 	19.7/30
Tylan 11-BPSG-LTO 	Up 	  	17.5/30
Tylan 12-FGA 	Up 	  	 
Tystar 	Up 	  	13.5/30
Doped Poly 	GONE 	  	 
TEOS 	yellow 	 running 	 
Tylan 16 	N/A 	  	 
Burn Box 	Up 	  	 
ZYGO 	Up 	  	 
GAAS 22 	UP 	  	 
GAAS 23 	UP 	  	 
SiH4 for furnaces 	  	Auto changeover working well 	A on line 430 PSI

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