Diffusion Morning Report

Ray Seymour seymour at snf.stanford.edu
Tue Jun 22 08:37:27 PDT 2004


Good Morning,
Most of the area equipment is behaving very well. The Burnbox pressure
is a little to the positive pressure
side of the input manifold. Tubes are being run at this time, so I will
keep a close eye on it and espically around 1 pm when
we have a chance to do a quick clean. Tube 4 door interlock issue has
not been resolved yet. Everything else looking good.


Diffusion                   Date: 6/22/2004
Tube Name/Number  Status
Comments                               THICKNESS-Change at
Tylan 1 Up
Tylan 2 Up
Tylan 3 Up
Tylan 4 Down                                                       Door
interlock problems
Tylan 5-BBr3 Up
Tylan 6-POCl3 Up
Tylan 7-TEOS2 down                                           Qual
testing-recipe issues
Tylan 8-SiGe
Up
7.83/30
Tylan 9-Poly
Up
7.52/30
Tylan 10-Nitride yellow
Particles?                                      24.23/30
Tylan 11-BPSG-LTO
Up
21.57/30
Tylan 12-FGA Up
Tystar
Up
13.5/30
Doped Poly GONE
TEOS yellow  running
Tylan 16 N/A
Burn Box Up
ZYGO Up

GAAS 22 UP
GAAS 23 UP

SiH4 for furnaces                             Auto changeover working
well  A on line 400 PSI


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