Diffusion Morning Report

Ray Seymour seymour at snf.stanford.edu
Thu Jun 24 08:37:52 PDT 2004


Morning All;
Looking good this morning with only tube 4 down with the door interlock
not working. Nitride is getting close to a pull and clean probably on
Monday or Tuesday.


Diffusion                   Date: 6/24/2004
Tube Name/Number  Status
Comments                               THICKNESS-Change at
Tylan 1 Up
Tylan 2 Up
Tylan 3 Up
Tylan 4 Down                                                       Door
interlock problem
Tylan 5-BBr3 Up
Tylan 6-POCl3 Up
Tylan 7-TEOS2 down                                           Qual
testing-recipe issues
Tylan 8-SiGe
Up
7.83/30
Tylan 9-Poly
Up
7.85/30
Tylan 10-Nitride yellow
Particles?                                      27.97/30
Tylan 11-BPSG-LTO
Up
22.31/30
Tylan 12-FGA Up
Tystar
Up
13.5/30
Doped Poly GONE
TEOS yellow  running
Tylan 16 N/A
Burn Box Up
ZYGO Up

GAAS 22 UP
GAAS 23 UP

SiH4 for furnaces                             Auto changeover working
well  A on line 400 PSI






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