Diffusion Morning Report

Ray Seymour seymour at snf.stanford.edu
Fri Jun 25 08:03:10 PDT 2004


Diffusion                   Date: 6/25/2004
Tube Name/Number  Status
Comments                               THICKNESS-Change at
Tylan 1 Up
Tylan 2 Up
Tylan 3 Up
Tylan 4 Down                                                       Door
interlock problems
Tylan 5-BBr3 Up
Tylan 6-POCl3 Up
Tylan 7-TEOS2 down                                           Qual
testing-recipe issues
Tylan 8-SiGe
Up
7.83/30
Tylan 9-Poly
Up
7.56/30
Tylan 10-Nitride yellow
Particles?                                     28.17/30
Tylan 11-BPSG-LTO
Up
22.13/30
Tylan 12-FGA Up
Tystar
Up
13.5/30
Doped Poly GONE
TEOS yellow  running
Tylan 16 N/A
Burn Box Up
ZYGO Up

GAAS 22 UP
GAAS 23 UP

SiH4 for furnaces                             Auto changeover working
well  A on line 400 PSI
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