From tberg at snf.stanford.edu Mon Mar 1 06:38:41 2004 From: tberg at snf.stanford.edu (ted berg) Date: Mon, 01 Mar 2004 06:38:41 -0800 Subject: Diffusion Morning Report 03/01/04 Message-ID: <40434AF1.6010100@snf.stanford.edu> Good Morning all, Not too much up this morning-literally. Poly,Nitride,tystar,FGA, are down. SiGe has bad dep. TEOS 2 still waiting on MFC. ZYGO has a problem with the keyboard. Everything else OK for now. Diffusion Date: 3/1/2004 Tube Name/Number Status Comments THICKNESS-Change at Tylan 1 Up Tylan 2 Up Tylan 3 Up Tylan 4 Up Tylan 5-BBr3 Up Tylan 6-POCl3 Up Tylan 7-TEOS2 down TEOS Conversion_mfc Tylan 8-SiGe yellow UGLY DEP 3.66/30 Tylan 9-Poly down pull and clean 0/30 Tylan 10-Nitride down particles-won't vent 18.1/30?????? Tylan 11-BPSG-LTO Up 2.75/30 Tylan 12-FGA down temp problems Tystar down pull and clean 0/30 Doped Poly GONE TEOS yellow running Tylan 16 N/A Burn Box Up ZYGO yellow keyboard problem GAAS 22 UP GAAS 23 UP SiH4 for furnaces Auto changeover working well A on line 680 PSI -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at snf.stanford.edu Tue Mar 2 07:28:55 2004 From: tberg at snf.stanford.edu (ted berg) Date: Tue, 02 Mar 2004 07:28:55 -0800 Subject: Diffusion Morning Report 03/02/04 Message-ID: <4044A837.3050308@snf.stanford.edu> Good Morning All, Looking much better than yesterday. Poly is back up, Tystar has benn pulled and replaced needs coat and test. Nitride still has a few particles Talking to Voltaix on SiGe issues. HCL for Epi had some parts replaced and is in leak check. Everything else seems to be OK. Diffusion Date: 3/2/2004 Tube Name/Number Status Comments THICKNESS-Change at Tylan 1 Up Tylan 2 Up Tylan 3 Up Tylan 4 Up Tylan 5-BBr3 Up Tylan 6-POCl3 Up Tylan 7-TEOS2 down Waiting for Mfc Tylan 8-SiGe yellow UGLY DEP-Si ok 4.22/30 Tylan 9-Poly Up .17/30 Tylan 10-Nitride yellow particles 18.7/30 Tylan 11-BPSG-LTO Up 2.75/30 Tylan 12-FGA Up Tystar down pull and clean 0/30 Doped Poly GONE TEOS yellow running Tylan 16 N/A Burn Box Up ZYGO yellow keyboard problem GAAS 22 UP GAAS 23 UP SiH4 for furnaces Auto changeover working well A on line 670 PSI -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at snf.stanford.edu Wed Mar 3 07:14:07 2004 From: tberg at snf.stanford.edu (ted berg) Date: Wed, 03 Mar 2004 07:14:07 -0800 Subject: Diffusion Morning Report 03/04/04 Message-ID: <4045F63F.8070501@snf.stanford.edu> Good Morning All, Looking good this morning. Still particle issues with Nitride. Tystar is coated after pull and clean and ready for test. HCl for Epi is back on Still waiting for MFC for TEOS2. Everything else looking OK. Diffusion Date: 3/4/2004 Tube Name/Number Status Comments THICKNESS-Change at Tylan 1 Up Tylan 2 Up Tylan 3 Up Tylan 4 Up Tylan 5-BBr3 Up Tylan 6-POCl3 Up Tylan 7-TEOS2 down Waiting for Mfc Tylan 8-SiGe yellow UGLY DEP-Si ok 4.2/30 Tylan 9-Poly Up .99/30 Tylan 10-Nitride yellow particles 18.7/30 Tylan 11-BPSG-LTO Up 3.75/30 Tylan 12-FGA Up Tystar down pull and clean-completed 0/30 Doped Poly GONE TEOS yellow running Tylan 16 N/A Burn Box Up ZYGO yellow keyboard problem GAAS 22 UP GAAS 23 UP SiH4 for furnaces Auto changeover working well A on line 670 PSI -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at snf.stanford.edu Thu Mar 4 06:37:59 2004 From: tberg at snf.stanford.edu (ted berg) Date: Thu, 04 Mar 2004 06:37:59 -0800 Subject: Diffusion Morning Report 03/04/04 Message-ID: <40473F47.2000608@snf.stanford.edu> Good Morning All, Looking Ok this morning. Nitride still has some particle issues-He leak checked yesterday none found. SiGe is OK now. Tystar had a problem during re assembly and is still down. TEOS 2 still waiting MFC. Everything else looking OK. Diffusion Date: 3/4/2004 Tube Name/Number Status Comments THICKNESS-Change at Tylan 1 Up Tylan 2 Up Tylan 3 Up Tylan 4 Up Tylan 5-BBr3 Up Tylan 6-POCl3 Up Tylan 7-TEOS2 down Waiting for Mfc Tylan 8-SiGe Up 4.8/30 Tylan 9-Poly Up .99/30 Tylan 10-Nitride yellow particles 20.7/30 Tylan 11-BPSG-LTO Up 3.75/30 Tylan 12-FGA Up Tystar down pull and clean-in work 0/30 Doped Poly GONE TEOS yellow running Tylan 16 N/A Burn Box Up ZYGO yellow keyboard problem GAAS 22 UP GAAS 23 UP SiH4 for furnaces Auto changeover working well A on line 660 PSI -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at snf.stanford.edu Fri Mar 5 06:53:49 2004 From: tberg at snf.stanford.edu (ted berg) Date: Fri, 05 Mar 2004 06:53:49 -0800 Subject: Diffusion Morning Report 03/05/04 Message-ID: <4048947D.1030200@snf.stanford.edu> Good Morning All, Looking Ok this morning. Had a problem with new readout controller was not allowing switch to main valve-replaced with old one and tested. Tystar was coated and had leak fail -looking into it. Everything else is ok. Diffusion Date: 3/5/2004 Tube Name/Number Status Comments THICKNESS-Change at Tylan 1 Up Tylan 2 Up Tylan 3 Up Tylan 4 Up Tylan 5-BBr3 Up Tylan 6-POCl3 Up Tylan 7-TEOS2 down Waiting for Mfc Tylan 8-SiGe Up 5.4/30 Tylan 9-Poly Up 1.3/30 Tylan 10-Nitride yellow particles 20.8/30 Tylan 11-BPSG-LTO Up 7.14/30 Tylan 12-FGA Up Tystar down pull and clean-in work 0/30 Doped Poly GONE TEOS yellow running Tylan 16 N/A Burn Box Up ZYGO yellow keyboard problem GAAS 22 UP GAAS 23 UP SiH4 for furnaces Auto changeover working well A on line 660 PSI -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at snf.stanford.edu Mon Mar 8 06:42:32 2004 From: tberg at snf.stanford.edu (ted berg) Date: Mon, 08 Mar 2004 06:42:32 -0800 Subject: Diffusion Morning Report 03/08/04 Message-ID: <404C8658.1010409@snf.stanford.edu> Good Morning All, Looking pretty good this morning. Tystar is still down having pump down issues. Ran a coat and first poly run on Thermco-it looked not good.. Nitride still has particles intermittantly. TEOS 2 MFC should be here on March 26th. WARNING: Tomorrow we will be shutting down WBDIFF to install the new 2 stack rinser dryer-4/6" so the bench will be down for several hours. Everything else looking OK Diffusion Date: 3/8/2004 Tube Name/Number Status Comments THICKNESS-Change at Tylan 1 Up Tylan 2 Up Tylan 3 Up Tylan 4 Up Tylan 5-BBr3 Up Tylan 6-POCl3 Up Tylan 7-TEOS2 down Waiting for Mfc-3/26 delivery Tylan 8-SiGe Up 5.4/30 Tylan 9-Poly Up 1.64/30 Tylan 10-Nitride yellow particles 21.9/30 Tylan 11-BPSG-LTO Up 8.1/30 Tylan 12-FGA Up Tystar down pull and clean-in work 0/30 Doped Poly GONE TEOS yellow running Tylan 16 N/A Burn Box Up ZYGO yellow keyboard problem GAAS 22 UP GAAS 23 UP SiH4 for furnaces Auto changeover working well A on line 660 PSI -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at snf.stanford.edu Tue Mar 9 06:44:48 2004 From: tberg at snf.stanford.edu (ted berg) Date: Tue, 09 Mar 2004 06:44:48 -0800 Subject: Diffusion Morning Report 03/09/04 Message-ID: <404DD860.2030602@snf.stanford.edu> Good Morning All, Looking ok this morning. WBdiff down today to install 4/6" dryer. Nitride still has particles. Tystar still has pump down problems. SiGe doing temp cal. Everything else looks ok. Diffusion Date: 3/9/2004 Tube Name/Number Status Comments THICKNESS-Change at Tylan 1 Up Tylan 2 Up Tylan 3 Up Tylan 4 Up Tylan 5-BBr3 Up Tylan 6-POCl3 Up Tylan 7-TEOS2 down Waiting for Mfc-3/26 delivery Tylan 8-SiGe Up 5.4/30 Tylan 9-Poly Up 1.9/30 Tylan 10-Nitride yellow particles 21.9/30 Tylan 11-BPSG-LTO Up 9.0/30 Tylan 12-FGA Up Tystar down pull and clean-in work 0/30 Doped Poly GONE TEOS yellow running Tylan 16 N/A Burn Box Up ZYGO yellow keyboard problem GAAS 22 UP GAAS 23 UP SiH4 for furnaces changeover working wellAuto A on line 660 PSI -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at snf.stanford.edu Wed Mar 10 06:45:18 2004 From: tberg at snf.stanford.edu (ted berg) Date: Wed, 10 Mar 2004 06:45:18 -0800 Subject: Diffusion Morning Report 03/10/04 Message-ID: <404F29FE.8000604@snf.stanford.edu> Good Morning All, Looking pretty good this morning. Dual stack rinser dryer was installed yesterday and it went quite well-thanks Ray for all the prep work. Nitride still has some particles-vac readout returned to vendor for repair. Tystar is finally back up-thanks Mike. BPSG has a broken TC sheath- Mike is replacing it this morning. SiGe is down for temp Cal. Everything else looking OK TEOS 2 waiting for MFc. Colby working on Poly profile for THERMCO. Diffusion Date: 3/10/2004 Tube Name/Number Status Comments THICKNESS-Change at Tylan 1 Up Tylan 2 Up Tylan 3 Up Tylan 4 Up Tylan 5-BBr3 Up Tylan 6-POCl3 Up Tylan 7-TEOS2 down Waiting for Mfc-3/26 delivery Tylan 8-SiGe down Temp cal 5.4/30 Tylan 9-Poly Up 1.9/30 Tylan 10-Nitride yellow particles 22.65/30 Tylan 11-BPSG-LTO down broken TC sheath 9.6/30 Tylan 12-FGA Up Tystar Up pull and clean-completed .8/30 Doped Poly GONE TEOS yellow running Tylan 16 N/A Burn Box Up ZYGO yellow keyboard problem GAAS 22 UP GAAS 23 UP SiH4 for furnaces Auto changeover working well A on line 660 PSI -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at snf.stanford.edu Thu Mar 11 07:40:02 2004 From: tberg at snf.stanford.edu (ted berg) Date: Thu, 11 Mar 2004 07:40:02 -0800 Subject: Diffusion Morning Report 04/11/04 Message-ID: <40508852.2050608@snf.stanford.edu> Good Morning All, Looking Ok this morning. The secondary vacuum readout on Nitride failed again last night and system would not pump down. Removed readout and put back to old way still particles. Burn box cleaned this morning since there were reservations tomorrow morning. SiGe still in temp cal. Installed temporary keyboard on Zygo. Everything else looks OK. Diffusion Date: 3/11/2004 Tube Name/Number Status Comments THICKNESS-Change at Tylan 1 Up Tylan 2 Up Tylan 3 Up Tylan 4 Up Tylan 5-BBr3 Up Tylan 6-POCl3 Up Tylan 7-TEOS2 down Waiting for Mfc-3/26 delivery Tylan 8-SiGe down Temp cal 5.4/30 Tylan 9-Poly Up 1.9/30 Tylan 10-Nitride yellow particles 22.65/30 Tylan 11-BPSG-LTO Up 10.7/30 Tylan 12-FGA Up Tystar Up pull and clean-completed 5.363/30 Doped Poly GONE TEOS yellow running Tylan 16 N/A Burn Box Up ZYGO yellow keyboard problem GAAS 22 UP GAAS 23 UP SiH4 for furnaces Auto changeover working well A on line 660 PSI -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at snf.stanford.edu Fri Mar 12 06:51:23 2004 From: tberg at snf.stanford.edu (ted berg) Date: Fri, 12 Mar 2004 06:51:23 -0800 Subject: Diffusion Morning Report 03/12/04 Message-ID: <4051CE6B.7030708@snf.stanford.edu> Good Morning All, Looking ok this morning. BPSG has been changed and coated needs test. Nitride still has particles. SiGe still in temp cal. Changed keyboard on Zygo . Colby is testing Poly on Thermco. TEOS 2 still waiting for MFC. Everything else OK. Diffusion Date: 3/12/2004 Tube Name/Number Status Comments THICKNESS-Change at Tylan 1 Up Tylan 2 Up Replaced profile TC yesterday Tylan 3 Up Tylan 4 Up Tylan 5-BBr3 Up Tylan 6-POCl3 Up Tylan 7-TEOS2 down Waiting for Mfc-3/26 delivery Tylan 8-SiGe down Temp cal 5.4/30 Tylan 9-Poly Up 1.9/30 Tylan 10-Nitride yellow particles 24.1/30 Tylan 11-BPSG-LTO down Pull and clean 0/30 Tylan 12-FGA Up Tystar Up 5.363/30 Doped Poly GONE TEOS yellow running Tylan 16 N/A Burn Box Up ZYGO yellow keyboard problem GAAS 22 UP GAAS 23 UP SiH4 for furnaces Auto changeover working well A on line 660 PSI -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at snf.stanford.edu Mon Mar 15 06:33:46 2004 From: tberg at snf.stanford.edu (ted berg) Date: Mon, 15 Mar 2004 06:33:46 -0800 Subject: Diffusion Morning Report 03/15/04 Message-ID: <4055BECA.1060802@snf.stanford.edu> Good Morning All, Looking Ok this morning. BPSG is back after pull and clean -uniformity is out a bit due to thin coating. Nitride is getting close to pull and clean Poly took a big jump with a 5 micron dep. Still fighting temp cal on SiGe. Waiting for MFC for TEOS2. Everything else looks Ok. Colby working on Thermco Poly. Diffusion Date: 3/15/2004 Tube Name/Number Status Comments THICKNESS-Change at Tylan 1 Up Tylan 2 Up Tylan 3 Up Tylan 4 Up Tylan 5-BBr3 Up Tylan 6-POCl3 Up Tylan 7-TEOS2 down Waiting for Mfc-3/26 delivery Tylan 8-SiGe down Temp cal 5.4/30 Tylan 9-Poly Up 8.1/30 Tylan 10-Nitride yellow particles 26.12/30 Tylan 11-BPSG-LTO yellow non uniform .85/30 Tylan 12-FGA Up Tystar Up .9/30 Doped Poly GONE TEOS yellow running Tylan 16 N/A Burn Box Up ZYGO yellow keyboard problem GAAS 22 UP GAAS 23 UP SiH4 for furnaces Auto changeover working well A on line 660 PSI -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at snf.stanford.edu Tue Mar 16 06:28:19 2004 From: tberg at snf.stanford.edu (ted berg) Date: Tue, 16 Mar 2004 06:28:19 -0800 Subject: Diffusion Morning Report 03/16/04 Message-ID: <40570F03.6090003@snf.stanford.edu> Good Morning All, Looking pretty good this morning. Nitride is getting very close to pull and clean, I have reserved Monday but it might not make it. Burn box has high pressure this morning and it doesn't look like there are any gaps to take it down! Still doing temp cal on SiGe. MFC for TEOS 2 should be here next week. Replaced temp firing board on TEOs. Everything else looking OK. Diffusion Date: 3/16/2004 Tube Name/Number Status Comments THICKNESS-Change at Tylan 1 Up Tylan 2 Up Tylan 3 Up Tylan 4 Up Tylan 5-BBr3 Up Tylan 6-POCl3 Up Tylan 7-TEOS2 down Waiting for Mfc-3/26 delivery Tylan 8-SiGe down Temp cal 5.4/30 Tylan 9-Poly Up 8.1/30 Tylan 10-Nitride yellow particles 28.4/30 Tylan 11-BPSG-LTO Up 1.63/30 Tylan 12-FGA Up Tystar Up 1.2/30 Doped Poly GONE TEOS yellow running Tylan 16 N/A Burn Box Up ZYGO yellow keyboard problem GAAS 22 UP GAAS 23 UP SiH4 for furnaces Auto changeover working well A on line 660 PSI -------------- next part -------------- An HTML attachment was scrubbed... URL: From fevcxav at room66.net Tue Mar 16 00:15:25 2004 From: fevcxav at room66.net (team-support) Date: Tue, 16 Mar 2004 03:15:25 -0500 Subject: Re'fi nace low as 3.25% Message-ID: <1079424925.2566@web56.netoperations4.com> An HTML attachment was scrubbed... URL: From tberg at snf.stanford.edu Wed Mar 17 06:28:56 2004 From: tberg at snf.stanford.edu (ted berg) Date: Wed, 17 Mar 2004 06:28:56 -0800 Subject: Diffusion Morning Report 03/17/04 Message-ID: <405860A8.8040901@snf.stanford.edu> Good Morning and Happy St. Patrick's day to all, Looking pretty good this morning. Nitride still has particle issues and is getting close to pull and clean. It will happen on Monday. SiGe is in process of calibration. TEOS MFC due next week. Everything else looks ok Diffusion Date: 3/17/2004 Tube Name/Number Status Comments THICKNESS-Change at Tylan 1 Up Tylan 2 Up Tylan 3 Up Tylan 4 Up Tylan 5-BBr3 Up Tylan 6-POCl3 Up Tylan 7-TEOS2 down Waiting for Mfc-3/26 delivery Tylan 8-SiGe down Temp cal 5.4/30 Tylan 9-Poly Up 8.1/30 Tylan 10-Nitride yellow particles 28.6/30 Tylan 11-BPSG-LTO Up 1.63/30 Tylan 12-FGA Up Tystar Up 1.2/30 Doped Poly GONE TEOS yellow running Tylan 16 N/A Burn Box Up ZYGO yellow keyboard problem GAAS 22 UP GAAS 23 UP SiH4 for furnaces Auto changeover working well A on line 660 PSI -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at snf.stanford.edu Thu Mar 18 06:40:53 2004 From: tberg at snf.stanford.edu (ted berg) Date: Thu, 18 Mar 2004 06:40:53 -0800 Subject: Diffusion Morning Report 04/18/04 Message-ID: <4059B4F5.6070506@snf.stanford.edu> Good Morning All, Looking pretty goood this morning. Nitride going down for pull and clean on Monday. Si Ge still in temp cal. TEOS MFC due next week. Everything else looking OK. Diffusion Date: 3/18/2004 Tube Name/Number Status Comments THICKNESS-Change at Tylan 1 Up Tylan 2 Up Tylan 3 Up Tylan 4 Up Tylan 5-BBr3 Up Tylan 6-POCl3 Up Tylan 7-TEOS2 down Waiting for Mfc-3/26 delivery Tylan 8-SiGe down Temp cal 5.4/30 Tylan 9-Poly Up 8.1/30 Tylan 10-Nitride yellow particles 28.87/30 Tylan 11-BPSG-LTO Up 1.63/30 Tylan 12-FGA Up Tystar Up 1.2/30 Doped Poly GONE TEOS yellow running Tylan 16 N/A Burn Box Up ZYGO Up keyboard replaced GAAS 22 UP GAAS 23 UP SiH4 for furnaces Auto changeover working well A on line 660 PSI -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at snf.stanford.edu Fri Mar 19 07:20:16 2004 From: tberg at snf.stanford.edu (ted berg) Date: Fri, 19 Mar 2004 07:20:16 -0800 Subject: Diffusion Morning Report 03/19/04 Message-ID: <405B0FB0.3030604@snf.stanford.edu> Good Morning All, Looking OK this morning after a few issues. Soft pump on Nitride was clogged so tube wouldn't vent-it was replaced. It looks like nitride is at about 31+ micron this morning book was not updated. Burn box was cleaned this morning. Several temps in SiGe were calibrated-process continues. Everything else looks ok Diffusion Date: 3/19/2004 Tube Name/Number Status Comments THICKNESS-Change at Tylan 1 Up Tylan 2 Up Tylan 3 Up Tylan 4 Up Tylan 5-BBr3 Up Tylan 6-POCl3 Up Tylan 7-TEOS2 down Waiting for Mfc-3/26 delivery Tylan 8-SiGe down Temp cal 5.4/30 Tylan 9-Poly Up 10.1/30 Tylan 10-Nitride yellow particles-clogged soft pump replaced 31+/30 Tylan 11-BPSG-LTO Up 2.63/30 Tylan 12-FGA Up Tystar Up 1.2/30 Doped Poly GONE TEOS yellow running Tylan 16 N/A Burn Box Up Cleaned this morning ZYGO Up keyboard replaced GAAS 22 UP GAAS 23 UP SiH4 for furnaces Auto changeover working well A on line 660 PSI -------------- next part -------------- An HTML attachment was scrubbed... URL: From seymour at snf.stanford.edu Mon Mar 22 07:43:34 2004 From: seymour at snf.stanford.edu (Ray Seymour) Date: Mon, 22 Mar 2004 07:43:34 -0800 Subject: Diffusion Morning Report 3/22/04 Message-ID: <405F09A5.40AB5E97@snf.stanford.edu> Good Morning All, Ted is on vacation this wek. Mike has pulled the Nitride tube for a clean. Everything else looks pretty good Diffusion Date: 3/22/2004 Tube Name/Number Status Comments THICKNESS-Change at Tylan 1 Up Tylan 2 Up Tylan 3 Up Tylan 4 Up Tylan 5-BBr3 Up Tylan 6-POCl3 Up Tylan 7-TEOS2 down Waiting for Mfc-3/26 delivery Tylan 8-SiGe down Temp cal 5.4/30 Tylan 9-Poly Up 10.14/30 Tylan 10-Nitride red particles-pull and clean 31.16/30 Tylan 11-BPSG-LTO Up 2.83/30 Tylan 12-FGA Up Tystar Up 1.2/30 Doped Poly GONE TEOS yellow running Tylan 16 N/A Burn Box Up ZYGO Up keyboard replaced GAAS 22 UP GAAS 23 UP SiH4 for furnaces Auto changeover working well A on line 650 PSI -------------- next part -------------- An HTML attachment was scrubbed... URL: From seymour at snf.stanford.edu Tue Mar 23 07:58:40 2004 From: seymour at snf.stanford.edu (Ray Seymour) Date: Tue, 23 Mar 2004 07:58:40 -0800 Subject: Diffusion Morning Report 3/23/04 Message-ID: <40605EAF.D8BAF5B4@snf.stanford.edu> Good Morning All, WBGen is shutdown for drain line replacement. The Nitride pull and clean is progressing and should be ready for test later this afternoon. Everything else looks good. Have a great day. Diffusion Date: 3/23/2004 Tube Name/Number Status Comments THICKNESS-Change at Tylan 1 Up Tylan 2 Up Tylan 3 Up Tylan 4 Up Tylan 5-BBr3 Up Tylan 6-POCl3 Up Tylan 7-TEOS2 down Waiting for Mfc-3/26 delivery Tylan 8-SiGe down Temp cal in progress 5.4/30 Tylan 9-Poly Up 10.14/30 Tylan 10-Nitride down particles-pull and clean in progress 0/30 Tylan 11-BPSG-LTO Up 2.67/30 Tylan 12-FGA Up Tystar Up 1.2/30 Doped Poly GONE TEOS yellow running Tylan 16 N/A Burn Box Up ZYGO Up keyboard replaced GAAS 22 UP GAAS 23 UP SiH4 for furnaces Auto changeover working well A on line 640 PSI -------------- next part -------------- An HTML attachment was scrubbed... URL: From seymour at snf.stanford.edu Wed Mar 24 08:11:14 2004 From: seymour at snf.stanford.edu (Ray Seymour) Date: Wed, 24 Mar 2004 08:11:14 -0800 Subject: Diffusion Morning Report 3/24/04 Message-ID: <4061B322.3A325811@snf.stanford.edu> Good Morning All, Things are looking pretty good this morning. The Nitride tube needs a test which is to happen this mrning. Diffusion Date: 3/23/2004 Tube Name/Number Status Comments THICKNESS-Change at Tylan 1 Up Tylan 2 Up Tylan 3 Up Tylan 4 Up Tylan 5-BBr3 Up Tylan 6-POCl3 Up Tylan 7-TEOS2 down Waiting for Mfc-3/26 delivery Tylan 8-SiGe down Temp cal in progress 5.4/30 Tylan 9-Poly Up 10.14/30 Tylan 10-Nitride down particles-Tube coated needs test 0/30 Tylan 11-BPSG-LTO Up 4.6/30 Tylan 12-FGA Up Tystar Up 1.2/30 Doped Poly GONE TEOS yellow running Tylan 16 N/A Burn Box Up ZYGO Up keyboard replaced GAAS 22 UP GAAS 23 UP SiH4 for furnaces Auto changeover working well A on line 640 PSI -------------- next part -------------- An HTML attachment was scrubbed... URL: From seymour at snf.stanford.edu Thu Mar 25 07:53:11 2004 From: seymour at snf.stanford.edu (Ray Seymour) Date: Thu, 25 Mar 2004 07:53:11 -0800 Subject: Diffusion Morning Report 3/25/04 Message-ID: <40630067.C872B19@snf.stanford.edu> Good Morning All, The nNitride tube is up. Teos tube pump port cleaning in progress. Diffusion Date: 3/25/2004 Tube Name/Number Status Comments THICKNESS-Change at Tylan 1 Up Tylan 2 Up Tylan 3 Up Tylan 4 Up Tylan 5-BBr3 Up Tylan 6-POCl3 Up Tylan 7-TEOS2 down Waiting for Mfc-3/26 delivery Tylan 8-SiGe down Temp cal in progress 5.68/30 Tylan 9-Poly Up 10.44/30 Tylan 10-Nitride Up particles .1/30 Tylan 11-BPSG-LTO Up 6.05/30 Tylan 12-FGA Up Tystar Up 1.2/30 Doped Poly GONE TEOS yellow running cleaning pump port and source change Tylan 16 N/A Burn Box Up ZYGO Up keyboard replaced GAAS 22 UP GAAS 23 UP SiH4 for furnaces Auto changeover working well A on line 640 PSI -------------- next part -------------- An HTML attachment was scrubbed... URL: From seymour at snf.stanford.edu Fri Mar 26 08:33:04 2004 From: seymour at snf.stanford.edu (Ray Seymour) Date: Fri, 26 Mar 2004 08:33:04 -0800 Subject: Diffusion morning report 3/26/04 Message-ID: <40645B40.FBBA9C26@snf.stanford.edu> Good Morning All, Expecting delivery of TEOS2 MFC today. Everything else looks pretty good today. Diffusion Date: 3/25/2004 Tube Name/Number Status Comments THICKNESS-Change at Tylan 1 Up Tylan 2 Up Tylan 3 Up Tylan 4 Up Tylan 5-BBr3 Up Tylan 6-POCl3 Up Tylan 7-TEOS2 down Waiting for Mfc-3/26 delivery Tylan 8-SiGe down Temp cal in progress 5.68/30 Tylan 9-Poly Up 10.59/30 Tylan 10-Nitride Up particles .3.71/30 Tylan 11-BPSG-LTO Up 6.4/30 Tylan 12-FGA Up Tystar Up 1.2/30 Doped Poly GONE TEOS yellow running Burn Box Up Cleaned this morning ZYGO Up keyboard replaced GAAS 22 UP GAAS 23 UP SiH4 for furnaces Auto changeover working well A on line 620 PSI -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at snf.stanford.edu Mon Mar 29 08:30:59 2004 From: tberg at snf.stanford.edu (ted berg) Date: Mon, 29 Mar 2004 08:30:59 -0800 Subject: Diffusion Morning Report 03/29/04 Message-ID: <40684F43.4070707@snf.stanford.edu> Good Morning all, Looking pretty good this morning. Had a temp issue with Nitride, remade tc connections on profile and tightened spikes. Temp is falling now. SiGe is getting closer on Temp Status. Everything else looking Ok Diffusion Date: 3/29/2004 Tube Name/Number Status Comments THICKNESS-Change at Tylan 1 Up Tylan 2 Up Tylan 3 Up Tylan 4 Up Tylan 5-BBr3 Up Tylan 6-POCl3 Up Tylan 7-TEOS2 down Waiting for Mfc-3/26 delivery Tylan 8-SiGe down Temp cal 5.4/30 Tylan 9-Poly Up 13.1/30 Tylan 10-Nitride yellow particles-temp issues 6.25/30 Tylan 11-BPSG-LTO Up 8.9/30 Tylan 12-FGA Up Tystar Up 1.2/30 Doped Poly GONE TEOS yellow running Tylan 16 N/A Burn Box Up ZYGO Up keyboard replaced GAAS 22 UP GAAS 23 UP SiH4 for furnaces Auto changeover working well A on line 640 PSI -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at snf.stanford.edu Tue Mar 30 06:39:35 2004 From: tberg at snf.stanford.edu (ted berg) Date: Tue, 30 Mar 2004 06:39:35 -0800 Subject: Diffusion Morning Report 03/30/04 Message-ID: <406986A7.9020908@snf.stanford.edu> Good Morning All, Looking pretty good this morning. Still observing Nitride. Temp cal ongoing on SiGe. MFC for TEOS 2 still not here. everything else is looking Ok. Diffusion Date: 3/30/2004 Tube Name/Number Status Comments THICKNESS-Change at Tylan 1 Up Tylan 2 Up Tylan 3 Up Tylan 4 Up Tylan 5-BBr3 Up Tylan 6-POCl3 Up Tylan 7-TEOS2 down Waiting for Mfc-3/26 delivery?? Tylan 8-SiGe down Temp cal 5.4/30 Tylan 9-Poly Up 13.1/30 Tylan 10-Nitride yellow particles- 6.65/30 Tylan 11-BPSG-LTO Up 9.0/30 Tylan 12-FGA Up Tystar Up 1.2/30 Doped Poly GONE TEOS yellow running Tylan 16 N/A Burn Box Up ZYGO Up keyboard replaced GAAS 22 UP GAAS 23 UP SiH4 for furnaces Auto changeover working well A on line 640 PSI -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at snf.stanford.edu Wed Mar 31 06:33:28 2004 From: tberg at snf.stanford.edu (ted berg) Date: Wed, 31 Mar 2004 06:33:28 -0800 Subject: Diffusion Morning Report 03/31/04 Message-ID: <406AD6B8.7010709@snf.stanford.edu> Good Morning All, Things are looking pretty good this morning, a couple of nagging problems have been resolved. SiGe temp cal is finally completed. Zygo keyboard/coral is resolved. We replaced a bad thermocouple on Tylan 5 yesterday. Nitride is still under observation. MFC for TEOS2 was delayed due to parts issues we should have it by the end of the week. Everything else looks ok. Diffusion Date: 3/31/2004 Tube Name/Number Status Comments THICKNESS-Change at Tylan 1 Up Tylan 2 Up Tylan 3 Up Tylan 4 Up Tylan 5-BBr3 Up Tylan 6-POCl3 Up Tylan 7-TEOS2 down Waiting for Mfc-4/1 delivery Tylan 8-SiGe Up Temp cal-completed 5.4/30 Tylan 9-Poly Up 13.4/30 Tylan 10-Nitride yellow particles- 6.77/30 Tylan 11-BPSG-LTO Up 9.4/30 Tylan 12-FGA Up Tystar Up 1.2/30 Doped Poly GONE TEOS yellow running Tylan 16 N/A Burn Box Up ZYGO Up GAAS 22 UP GAAS 23 UP SiH4 for furnaces Auto changeover working well A on line 620 PSI -------------- next part -------------- An HTML attachment was scrubbed... URL: