Diffusion Morning Report 03/01/04

ted berg tberg at snf.stanford.edu
Mon Mar 1 06:38:41 PST 2004

    Good Morning all,
    Not too much up this morning-literally. Poly,Nitride,tystar,FGA, are 
down. SiGe has bad dep. TEOS 2 still waiting on MFC. ZYGO has
a problem with the keyboard.  Everything else OK for now.

Diffusion 	Date: 	3/1/2004 	 
Tube Name/Number 	Status 	Comments 	THICKNESS-Change at
Tylan 1 	Up 	  	 
Tylan 2 	Up 	  	 
Tylan 3 	Up 	  	 
Tylan 4 	Up 	  	 
Tylan 5-BBr3 	Up 	  	 
Tylan 6-POCl3 	Up 	  	 
Tylan 7-TEOS2 	down 	TEOS Conversion_mfc 	 
Tylan 8-SiGe 	yellow 	UGLY DEP 	3.66/30
Tylan 9-Poly 	down 	pull and clean 	0/30
Tylan 10-Nitride 	down 	particles-won't vent 	18.1/30??????
Tylan 11-BPSG-LTO 	Up 	  	2.75/30
Tylan 12-FGA 	down 	temp problems 	 
Tystar 	down 	pull and clean 	0/30
Doped Poly 	GONE 	  	 
TEOS 	yellow 	 running 	 
Tylan 16 	N/A 	  	 
Burn Box 	Up 	  	 
ZYGO 	yellow 	keyboard problem 	 
GAAS 22 	UP 	  	 
GAAS 23 	UP 	  	 
SiH4 for furnaces 	  	Auto changeover working well 	A on line 680 PSI

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