Diffusion Morning Report 03/02/04

ted berg tberg at snf.stanford.edu
Tue Mar 2 07:28:55 PST 2004

Good Morning  All,
    Looking much better than yesterday. Poly is back up, Tystar has benn 
pulled and replaced needs coat and test. Nitride still has a few particles
Talking to Voltaix on SiGe issues.  HCL for Epi had some parts replaced 
and is in leak check.  Everything else seems to be OK.

Diffusion 	Date: 	3/2/2004 	 
Tube Name/Number 	Status 	Comments 	THICKNESS-Change at
Tylan 1 	Up 	  	 
Tylan 2 	Up 	  	 
Tylan 3 	Up 	  	 
Tylan 4 	Up 	  	 
Tylan 5-BBr3 	Up 	  	 
Tylan 6-POCl3 	Up 	  	 
Tylan 7-TEOS2 	down 	Waiting for Mfc 	 
Tylan 8-SiGe 	yellow 	UGLY DEP-Si ok 	4.22/30
Tylan 9-Poly 	Up 	  	.17/30
Tylan 10-Nitride 	yellow 	particles 	18.7/30
Tylan 11-BPSG-LTO 	Up 	  	2.75/30
Tylan 12-FGA 	Up 	  	 
Tystar 	down 	pull and clean 	0/30
Doped Poly 	GONE 	  	 
TEOS 	yellow 	 running 	 
Tylan 16 	N/A 	  	 
Burn Box 	Up 	  	 
ZYGO 	yellow 	keyboard problem 	 
GAAS 22 	UP 	  	 
GAAS 23 	UP 	  	 
SiH4 for furnaces 	  	Auto changeover working well 	A on line 670 PSI

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