Diffusion Morning Report 03/04/04

ted berg tberg at snf.stanford.edu
Wed Mar 3 07:14:07 PST 2004


Good Morning All,
    Looking good this morning.  Still particle issues with Nitride.  
Tystar is coated after pull and clean and ready for test. HCl for Epi is 
back on
Still waiting for MFC for TEOS2.  Everything else looking OK.

Diffusion 	Date: 	3/4/2004 	 
Tube Name/Number 	Status 	Comments 	THICKNESS-Change at
Tylan 1 	Up 	  	 
Tylan 2 	Up 	  	 
Tylan 3 	Up 	  	 
Tylan 4 	Up 	  	 
Tylan 5-BBr3 	Up 	  	 
Tylan 6-POCl3 	Up 	  	 
Tylan 7-TEOS2 	down 	Waiting for Mfc 	 
Tylan 8-SiGe 	yellow 	UGLY DEP-Si ok 	4.2/30
Tylan 9-Poly 	Up 	  	.99/30
Tylan 10-Nitride 	yellow 	particles 	18.7/30
Tylan 11-BPSG-LTO 	Up 	  	3.75/30
Tylan 12-FGA 	Up 	  	 
Tystar 	down 	pull and clean-completed 	0/30
Doped Poly 	GONE 	  	 
TEOS 	yellow 	 running 	 
Tylan 16 	N/A 	  	 
Burn Box 	Up 	  	 
ZYGO 	yellow 	keyboard problem 	 
  	  	  	 
GAAS 22 	UP 	  	 
GAAS 23 	UP 	  	 
  	  	  	 
SiH4 for furnaces 	  	Auto changeover working well 	A on line 670 PSI


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