Diffusion Morning Report 03/04/04

ted berg tberg at snf.stanford.edu
Thu Mar 4 06:37:59 PST 2004


Good Morning All,
    Looking Ok this morning.  Nitride still has some particle issues-He 
leak checked yesterday none found. SiGe is OK now. Tystar
had a problem during re assembly and is still down.  TEOS 2 still 
waiting MFC.  Everything else looking OK.

Diffusion 	Date: 	3/4/2004 	 
Tube Name/Number 	Status 	Comments 	THICKNESS-Change at
Tylan 1 	Up 	  	 
Tylan 2 	Up 	  	 
Tylan 3 	Up 	  	 
Tylan 4 	Up 	  	 
Tylan 5-BBr3 	Up 	  	 
Tylan 6-POCl3 	Up 	  	 
Tylan 7-TEOS2 	down 	Waiting for Mfc 	 
Tylan 8-SiGe 	Up 	  	4.8/30
Tylan 9-Poly 	Up 	  	.99/30
Tylan 10-Nitride 	yellow 	particles 	20.7/30
Tylan 11-BPSG-LTO 	Up 	  	3.75/30
Tylan 12-FGA 	Up 	  	 
Tystar 	down 	pull and clean-in work 	0/30
Doped Poly 	GONE 	  	 
TEOS 	yellow 	 running 	 
Tylan 16 	N/A 	  	 
Burn Box 	Up 	  	 
ZYGO 	yellow 	keyboard problem 	 
  	  	  	 
GAAS 22 	UP 	  	 
GAAS 23 	UP 	  	 
  	  	  	 
SiH4 for furnaces 	  	Auto changeover working well 	A on line 660 PSI


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