Diffusion Morning Report 03/08/04

ted berg tberg at snf.stanford.edu
Mon Mar 8 06:42:32 PST 2004

Good Morning All,
     Looking pretty good this morning.  Tystar is still down having pump 
down issues.  Ran a coat and first poly run on Thermco-it looked
not good..  Nitride still has particles intermittantly.  TEOS 2 MFC 
should be here on March 26th.  WARNING: Tomorrow we will be shutting 
down WBDIFF to install the new 2 stack rinser dryer-4/6" so the bench 
will be down for several hours.  Everything else looking OK

Diffusion 	Date: 	3/8/2004 	 
Tube Name/Number 	Status 	Comments 	THICKNESS-Change at
Tylan 1 	Up 	  	 
Tylan 2 	Up 	  	 
Tylan 3 	Up 	  	 
Tylan 4 	Up 	  	 
Tylan 5-BBr3 	Up 	  	 
Tylan 6-POCl3 	Up 	  	 
Tylan 7-TEOS2 	down 	Waiting for Mfc-3/26 delivery 	 
Tylan 8-SiGe 	Up 	  	5.4/30
Tylan 9-Poly 	Up 	  	1.64/30
Tylan 10-Nitride 	yellow 	particles 	21.9/30
Tylan 11-BPSG-LTO 	Up 	  	8.1/30
Tylan 12-FGA 	Up 	  	 
Tystar 	down 	pull and clean-in work 	0/30
Doped Poly 	GONE 	  	 
TEOS 	yellow 	 running 	 
Tylan 16 	N/A 	  	 
Burn Box 	Up 	  	 
ZYGO 	yellow 	keyboard problem 	 
GAAS 22 	UP 	  	 
GAAS 23 	UP 	  	 
SiH4 for furnaces 	  	Auto changeover working well 	A on line 660 PSI

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