Diffusion Morning Report 03/10/04

ted berg tberg at snf.stanford.edu
Wed Mar 10 06:45:18 PST 2004

Good Morning All,
    Looking pretty good this morning.  Dual stack rinser dryer was 
installed yesterday and it went quite well-thanks Ray for all the prep work.
Nitride still has some particles-vac readout returned to vendor for 
repair.  Tystar is finally back up-thanks Mike. BPSG has a broken TC sheath-
Mike is replacing it this morning. SiGe is down for temp Cal.  
Everything else looking  OK TEOS 2 waiting for MFc.  Colby working on Poly
profile for THERMCO.

Diffusion 	Date: 	3/10/2004 	 
Tube Name/Number 	Status 	Comments 	THICKNESS-Change at
Tylan 1 	Up 	  	 
Tylan 2 	Up 	  	 
Tylan 3 	Up 	  	 
Tylan 4 	Up 	  	 
Tylan 5-BBr3 	Up 	  	 
Tylan 6-POCl3 	Up 	  	 
Tylan 7-TEOS2 	down 	Waiting for Mfc-3/26 delivery 	 
Tylan 8-SiGe 	down 	Temp cal 	5.4/30
Tylan 9-Poly 	Up 	  	1.9/30
Tylan 10-Nitride 	yellow 	particles 	22.65/30
Tylan 11-BPSG-LTO 	down 	broken TC sheath 	9.6/30
Tylan 12-FGA 	Up 	  	 
Tystar 	Up 	pull and clean-completed 	.8/30
Doped Poly 	GONE 	  	 
TEOS 	yellow 	 running 	 
Tylan 16 	N/A 	  	 
Burn Box 	Up 	  	 
ZYGO 	yellow 	keyboard problem 	 
GAAS 22 	UP 	  	 
GAAS 23 	UP 	  	 
SiH4 for furnaces 	  	Auto changeover working well 	A on line 660 PSI

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