Diffusion Morning Report 04/11/04

ted berg tberg at snf.stanford.edu
Thu Mar 11 07:40:02 PST 2004


Good Morning All,
    Looking Ok this morning.  The secondary vacuum readout on Nitride 
failed again last night and system would not pump down.
Removed readout and put back to old way still particles.  Burn box 
cleaned this morning since there were reservations tomorrow morning. SiGe
still in temp cal. Installed temporary keyboard on Zygo.  Everything 
else looks OK.

Diffusion 	Date: 	3/11/2004 	 
Tube Name/Number 	Status 	Comments 	THICKNESS-Change at
Tylan 1 	Up 	  	 
Tylan 2 	Up 	  	 
Tylan 3 	Up 	  	 
Tylan 4 	Up 	  	 
Tylan 5-BBr3 	Up 	  	 
Tylan 6-POCl3 	Up 	  	 
Tylan 7-TEOS2 	down 	Waiting for Mfc-3/26 delivery 	 
Tylan 8-SiGe 	down 	Temp cal 	5.4/30
Tylan 9-Poly 	Up 	  	1.9/30
Tylan 10-Nitride 	yellow 	particles 	22.65/30
Tylan 11-BPSG-LTO 	Up 	  	10.7/30
Tylan 12-FGA 	Up 	  	 
Tystar 	Up 	pull and clean-completed 	5.363/30
Doped Poly 	GONE 	  	 
TEOS 	yellow 	 running 	 
Tylan 16 	N/A 	  	 
Burn Box 	Up 	  	 
ZYGO 	yellow 	keyboard problem 	 
  	  	  	 
GAAS 22 	UP 	  	 
GAAS 23 	UP 	  	 
  	  	  	 
SiH4 for furnaces 	  	Auto changeover working well 	A on line 660 PSI


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