Diffusion Morning Report 03/15/04

ted berg tberg at snf.stanford.edu
Mon Mar 15 06:33:46 PST 2004

Good Morning All,
    Looking Ok this morning.  BPSG is back after pull and clean 
-uniformity is out a bit due to thin coating.  Nitride is getting close 
to pull and clean
Poly took a big jump with a 5 micron dep. Still fighting temp cal on 
SiGe.  Waiting for MFC for TEOS2.  Everything else looks Ok. Colby 
working on Thermco Poly.

Diffusion 	Date: 	3/15/2004 	 
Tube Name/Number 	Status 	Comments 	THICKNESS-Change at
Tylan 1 	Up 	  	 
Tylan 2 	Up 	  	 
Tylan 3 	Up 	  	 
Tylan 4 	Up 	  	 
Tylan 5-BBr3 	Up 	  	 
Tylan 6-POCl3 	Up 	  	 
Tylan 7-TEOS2 	down 	Waiting for Mfc-3/26 delivery 	 
Tylan 8-SiGe 	down 	Temp cal 	5.4/30
Tylan 9-Poly 	Up 	  	8.1/30
Tylan 10-Nitride 	yellow 	particles 	26.12/30
Tylan 11-BPSG-LTO 	yellow 	non uniform 	.85/30
Tylan 12-FGA 	Up 	  	 
Tystar 	Up 	  	.9/30
Doped Poly 	GONE 	  	 
TEOS 	yellow 	 running 	 
Tylan 16 	N/A 	  	 
Burn Box 	Up 	  	 
ZYGO 	yellow 	keyboard problem 	 
GAAS 22 	UP 	  	 
GAAS 23 	UP 	  	 
SiH4 for furnaces 	  	Auto changeover working well 	A on line 660 PSI

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