Diffusion Morning Report 03/16/04

ted berg tberg at snf.stanford.edu
Tue Mar 16 06:28:19 PST 2004

Good Morning All,
    Looking pretty good this morning.  Nitride is getting very close to 
pull and clean, I have reserved Monday but it might not make it.
Burn box has high pressure this morning and it doesn't look like there 
are any gaps to take it down!  Still doing temp cal on SiGe.
 MFC for TEOS 2 should be here next week.  Replaced temp firing board on 
TEOs.  Everything else looking  OK.

Diffusion 	Date: 	3/16/2004 	 
Tube Name/Number 	Status 	Comments 	THICKNESS-Change at
Tylan 1 	Up 	  	 
Tylan 2 	Up 	  	 
Tylan 3 	Up 	  	 
Tylan 4 	Up 	  	 
Tylan 5-BBr3 	Up 	  	 
Tylan 6-POCl3 	Up 	  	 
Tylan 7-TEOS2 	down 	Waiting for Mfc-3/26 delivery 	 
Tylan 8-SiGe 	down 	Temp cal 	5.4/30
Tylan 9-Poly 	Up 	  	8.1/30
Tylan 10-Nitride 	yellow 	particles 	28.4/30
Tylan 11-BPSG-LTO 	Up 	  	1.63/30
Tylan 12-FGA 	Up 	  	 
Tystar 	Up 	  	1.2/30
Doped Poly 	GONE 	  	 
TEOS 	yellow 	 running 	 
Tylan 16 	N/A 	  	 
Burn Box 	Up 	  	 
ZYGO 	yellow 	keyboard problem 	 
GAAS 22 	UP 	  	 
GAAS 23 	UP 	  	 
SiH4 for furnaces 	  	Auto changeover working well 	A on line 660 PSI

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