Diffusion Morning Report 03/17/04

ted berg tberg at snf.stanford.edu
Wed Mar 17 06:28:56 PST 2004


Good Morning and Happy St. Patrick's day to all,
    Looking pretty good this morning.  Nitride still has particle issues 
and is getting close to pull and clean.  It will happen on Monday.
SiGe is in process of calibration.  TEOS MFC due next week.  Everything 
else looks ok 

Diffusion 	Date: 	3/17/2004 	 
Tube Name/Number 	Status 	Comments 	THICKNESS-Change at
Tylan 1 	Up 	  	 
Tylan 2 	Up 	  	 
Tylan 3 	Up 	  	 
Tylan 4 	Up 	  	 
Tylan 5-BBr3 	Up 	  	 
Tylan 6-POCl3 	Up 	  	 
Tylan 7-TEOS2 	down 	Waiting for Mfc-3/26 delivery 	 
Tylan 8-SiGe 	down 	Temp cal 	5.4/30
Tylan 9-Poly 	Up 	  	8.1/30
Tylan 10-Nitride 	yellow 	particles 	28.6/30
Tylan 11-BPSG-LTO 	Up 	  	1.63/30
Tylan 12-FGA 	Up 	  	 
Tystar 	Up 	  	1.2/30
Doped Poly 	GONE 	  	 
TEOS 	yellow 	 running 	 
Tylan 16 	N/A 	  	 
Burn Box 	Up 	  	 
ZYGO 	yellow 	keyboard problem 	 
  	  	  	 
GAAS 22 	UP 	  	 
GAAS 23 	UP 	  	 
  	  	  	 
SiH4 for furnaces 	  	Auto changeover working well 	A on line 660 PSI


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