Diffusion Morning Report 04/18/04

ted berg tberg at snf.stanford.edu
Thu Mar 18 06:40:53 PST 2004


Good Morning All,
    Looking pretty goood this morning.  Nitride going down for pull and 
clean on Monday. Si Ge still in temp cal. TEOS MFC due next week.
Everything else looking OK.


Diffusion 	Date: 	3/18/2004 	 
Tube Name/Number 	Status 	Comments 	THICKNESS-Change at
Tylan 1 	Up 	  	 
Tylan 2 	Up 	  	 
Tylan 3 	Up 	  	 
Tylan 4 	Up 	  	 
Tylan 5-BBr3 	Up 	  	 
Tylan 6-POCl3 	Up 	  	 
Tylan 7-TEOS2 	down 	Waiting for Mfc-3/26 delivery 	 
Tylan 8-SiGe 	down 	Temp cal 	5.4/30
Tylan 9-Poly 	Up 	  	8.1/30
Tylan 10-Nitride 	yellow 	particles 	28.87/30
Tylan 11-BPSG-LTO 	Up 	  	1.63/30
Tylan 12-FGA 	Up 	  	 
Tystar 	Up 	  	1.2/30
Doped Poly 	GONE 	  	 
TEOS 	yellow 	 running 	 
Tylan 16 	N/A 	  	 
Burn Box 	Up 	  	 
ZYGO 	Up 	keyboard replaced 	 
  	  	  	 
GAAS 22 	UP 	  	 
GAAS 23 	UP 	  	 
  	  	  	 
SiH4 for furnaces 	  	Auto changeover working well 	A on line 660 PSI


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