Diffusion Morning Report 03/19/04

[ted berg]

Good Morning All,
    Looking  OK this morning after a few issues.   Soft pump on Nitride 
was clogged so tube wouldn't vent-it was replaced.   It looks like 
nitride is
at about 31+ micron this morning book was not updated. Burn box was 
cleaned this morning.  Several temps in SiGe were calibrated-process 
continues.
Everything else looks ok

Diffusion 	Date: 	3/19/2004 	 
Tube Name/Number 	Status 	Comments 	THICKNESS-Change at
Tylan 1 	Up 	  	 
Tylan 2 	Up 	  	 
Tylan 3 	Up 	  	 
Tylan 4 	Up 	  	 
Tylan 5-BBr3 	Up 	  	 
Tylan 6-POCl3 	Up 	  	 
Tylan 7-TEOS2 	down 	Waiting for Mfc-3/26 delivery 	 
Tylan 8-SiGe 	down 	Temp cal 	5.4/30
Tylan 9-Poly 	Up 	  	10.1/30
Tylan 10-Nitride 	yellow 	particles-clogged soft pump replaced 	31+/30
Tylan 11-BPSG-LTO 	Up 	  	2.63/30
Tylan 12-FGA 	Up 	  	 
Tystar 	Up 	  	1.2/30
Doped Poly 	GONE 	  	 
TEOS 	yellow 	 running 	 
Tylan 16 	N/A 	  	 
Burn Box 	Up 	Cleaned this morning 	 
ZYGO 	Up 	keyboard replaced 	 
  	  	  	 
GAAS 22 	UP 	  	 
GAAS 23 	UP 	  	 
  	  	  	 
SiH4 for furnaces 	  	Auto changeover working well 	A on line 660 PSI


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