Diffusion Morning Report 3/22/04

Ray Seymour seymour at snf.stanford.edu
Mon Mar 22 07:43:34 PST 2004


Good Morning All,
Ted is on vacation this wek. Mike has pulled the Nitride tube for a
clean. Everything else looks pretty good


Diffusion Date:    3/22/2004
Tube Name/Number                             Status
Comments                                    THICKNESS-Change at
Tylan 1 Up
Tylan 2 Up
Tylan 3 Up
Tylan 4 Up
Tylan 5-BBr3 Up
Tylan 6-POCl3 Up
Tylan 7-TEOS2 down                       Waiting for Mfc-3/26 delivery
Tylan 8-SiGe down                           Temp
cal                                                          5.4/30
Tylan 9-Poly
Up
10.14/30
Tylan 10-Nitride red                          particles-pull and
clean                                   31.16/30
Tylan 11-BPSG-LTO
Up
2.83/30
Tylan 12-FGA Up
Tystar
Up
1.2/30
Doped Poly GONE
TEOS yellow  running
Tylan 16 N/A
Burn Box Up
ZYGO Up keyboard replaced

GAAS 22 UP
GAAS 23 UP

SiH4 for furnaces                              Auto changeover working
well  A on line 650 PSI


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