Diffusion Morning Report 3/23/04

Ray Seymour seymour at snf.stanford.edu
Tue Mar 23 07:58:40 PST 2004


Good Morning All,
WBGen is shutdown for drain line replacement. The Nitride pull and clean
is progressing and should be ready for test
later this afternoon. Everything else looks good. Have a great day.


Diffusion Date:    3/23/2004
Tube Name/Number                             Status
Comments                                    THICKNESS-Change at
Tylan 1 Up
Tylan 2 Up
Tylan 3 Up
Tylan 4 Up
Tylan 5-BBr3 Up
Tylan 6-POCl3 Up
Tylan 7-TEOS2 down                       Waiting for Mfc-3/26 delivery
Tylan 8-SiGe down                           Temp cal  in
progress                                     5.4/30
Tylan 9-Poly
Up
10.14/30
Tylan 10-Nitride down                      particles-pull and clean  in
progress               0/30
Tylan 11-BPSG-LTO
Up
2.67/30
Tylan 12-FGA Up
Tystar
Up
1.2/30
Doped Poly GONE
TEOS yellow  running
Tylan 16 N/A
Burn Box Up
ZYGO Up keyboard replaced

GAAS 22 UP
GAAS 23 UP

SiH4 for furnaces                              Auto changeover working
well  A on line 640 PSI


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