Diffusion Morning Report 3/24/04

Ray Seymour seymour at snf.stanford.edu
Wed Mar 24 08:11:14 PST 2004


Good Morning All,
Things are looking pretty good this morning. The Nitride tube needs a
test which is to happen this mrning.


Diffusion Date:    3/23/2004
Tube Name/Number                             Status
Comments                                    THICKNESS-Change at
Tylan 1 Up
Tylan 2 Up
Tylan 3 Up
Tylan 4 Up
Tylan 5-BBr3 Up
Tylan 6-POCl3 Up
Tylan 7-TEOS2 down                       Waiting for Mfc-3/26 delivery
Tylan 8-SiGe down                           Temp cal  in
progress                                        5.4/30
Tylan 9-Poly
Up
10.14/30
Tylan 10-Nitride down                      particles-Tube coated needs
test                       0/30
Tylan 11-BPSG-LTO
Up
4.6/30
Tylan 12-FGA Up
Tystar
Up
1.2/30
Doped Poly GONE
TEOS yellow  running
Tylan 16 N/A
Burn Box Up
ZYGO Up keyboard replaced

GAAS 22 UP
GAAS 23 UP

SiH4 for furnaces                              Auto changeover working
well  A on line 640 PSI

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