Diffusion morning report 3/26/04

Ray Seymour seymour at snf.stanford.edu
Fri Mar 26 08:33:04 PST 2004


Good Morning All,
Expecting delivery of TEOS2 MFC today. Everything else looks pretty good
today.


Diffusion Date:    3/25/2004
Tube Name/Number                             Status
Comments                                    THICKNESS-Change at
Tylan 1 Up
Tylan 2 Up
Tylan 3 Up
Tylan 4 Up
Tylan 5-BBr3 Up
Tylan 6-POCl3 Up
Tylan 7-TEOS2 down                       Waiting for Mfc-3/26 delivery
Tylan 8-SiGe down                           Temp cal  in
progress                                          5.68/30
Tylan 9-Poly
Up
10.59/30
Tylan 10-Nitride Up
particles
.3.71/30
Tylan 11-BPSG-LTO
Up
6.4/30
Tylan 12-FGA Up
Tystar
Up
1.2/30
Doped Poly GONE
TEOS yellow  running
Burn Box Up                                   Cleaned this morning
ZYGO Up keyboard replaced

GAAS 22 UP
GAAS 23 UP

SiH4 for furnaces                              Auto changeover working
well  A on line 620 PSI
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