From tberg at snf.stanford.edu Mon May 3 06:46:45 2004 From: tberg at snf.stanford.edu (ted berg) Date: Mon, 03 May 2004 06:46:45 -0700 Subject: Diffusion Morning Report 05/03/04 Message-ID: <40964D45.5030303@snf.stanford.edu> Good Morning All, Looking pretty good this morning. Burn box pressure is quite high +4 but someone is running it until 11:00am-numerous long runs scheduled in reservations-whats up?? Tylan 1 still down for I/O error board on the way from Tystar. TEOS2 MFC is here and installed testing. Nitride still under observation. Everything else looking OK. Diffusion Date: 5/32004 Tube Name/Number Status Comments THICKNESS-Change at Tylan 1 down I/O error Tylan 2 Up Tylan 3 Up Tylan 4 Up Tylan 5-BBr3 Up Tylan 6-POCl3 Up Tylan 7-TEOS2 down MFC is installed testing Tylan 8-SiGe Up 6.6/30 Tylan 9-Poly Up 26.3/30 Tylan 10-Nitride yellow particles-better??; 19.5+/30 Tylan 11-BPSG-LTO Up 25.7/30 Tylan 12-FGA Up Tystar Up 11.2/30 Doped Poly GONE TEOS yellow running Tylan 16 N/A Burn Box Up very high pressure ZYGO Up GAAS 22 UP GAAS 23 UP SiH4 for furnaces Auto changeover working well A on line 580 PSI -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at snf.stanford.edu Tue May 4 06:30:36 2004 From: tberg at snf.stanford.edu (ted berg) Date: Tue, 04 May 2004 06:30:36 -0700 Subject: Diffusion Morning Report 05/04/04 Message-ID: <40979AFC.3000302@snf.stanford.edu> Good Morning All, Looking pretty good this morning. Nitride is getting a lot of use. Tylan 1 is still down for I/O error even after several board changes. TEOS 2 mfc is in and functional waiting for last parts for plasma trap. All Lp tubes are getting close to change- should we take one down early? Burn box is at 0 looks like long runs are brutal. Thermco poly pump replaced yesterday-oil leak. Everything else looks OK. Diffusion Date: 5/4/2004 Tube Name/Number Status Comments THICKNESS-Change at Tylan 1 down I/O error Tylan 2 Up Tylan 3 Up Tylan 4 Up Tylan 5-BBr3 Up Tylan 6-POCl3 Up Tylan 7-TEOS2 down MFC is installed testing Tylan 8-SiGe Up 6.6/30 Tylan 9-Poly Up 26.3/30 Tylan 10-Nitride yellow particles-better??;long runs? 24.6/30 Tylan 11-BPSG-LTO Up 25.9/30 Tylan 12-FGA Up Tystar Up 11.2/30 Doped Poly GONE TEOS yellow running Tylan 16 N/A Burn Box Up ZYGO Up GAAS 22 UP GAAS 23 UP SiH4 for furnaces Auto changeover working well A on line 565 PSI -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at snf.stanford.edu Wed May 5 07:11:28 2004 From: tberg at snf.stanford.edu (ted berg) Date: Wed, 05 May 2004 07:11:28 -0700 Subject: Diffusion Morning Report05/05/04 Message-ID: <4098F610.4080608@snf.stanford.edu> Happy Cinco de Mayo, Looking pretty good this morning. Long runs mean Nitride will be going down tomorrow morning- had to bump a few people. LTO will be going down Monday morning for pull and clean. TEOS 2 plasma trap parts should be here tomorrow, recipe has been modified per TEOS user inputs. Everything else looking good. Diffusion Date: 5/5/2004 Tube Name/Number Status Comments THICKNESS-Change at Tylan 1 down I/O error Tylan 2 Up Tylan 3 Up Tylan 4 Up Tylan 5-BBr3 Up Tylan 6-POCl3 Up Tylan 7-TEOS2 down MFC is installed testing Tylan 8-SiGe Up 6.6/30 Tylan 9-Poly Up 27.3/30 Tylan 10-Nitride yellow particles-better??;long runs? 28.4/30 Tylan 11-BPSG-LTO Up 26.6/30 Tylan 12-FGA Up Tystar Up 11.2/30 Doped Poly GONE TEOS yellow running Tylan 16 N/A Burn Box Up ZYGO Up GAAS 22 UP GAAS 23 UP SiH4 for furnaces Auto changeover working well A on line 560 PSI -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at snf.stanford.edu Wed May 5 07:13:24 2004 From: tberg at snf.stanford.edu (ted berg) Date: Wed, 05 May 2004 07:13:24 -0700 Subject: Diffusion Morning Report05/05/04 Message-ID: <4098F684.2020003@snf.stanford.edu> Happy Cinco de Mayo, Looking pretty good this morning. Long runs mean Nitride will be going down tomorrow morning- had to bump a few people. LTO will be going down Monday morning for pull and clean. TEOS 2 plasma trap parts should be here tomorrow, recipe has been modified per TEOS user inputs. Everything else looking good. Diffusion Date: 5/5/2004 Tube Name/Number Status Comments THICKNESS-Change at Tylan 1 down I/O error Tylan 2 Up Tylan 3 Up Tylan 4 Up Tylan 5-BBr3 Up Tylan 6-POCl3 Up Tylan 7-TEOS2 down MFC is installed testing Tylan 8-SiGe Up 6.6/30 Tylan 9-Poly Up 27.3/30 Tylan 10-Nitride yellow particles-better??;long runs? 28.4/30 Tylan 11-BPSG-LTO Up 26.6/30 Tylan 12-FGA Up Tystar Up 11.2/30 Doped Poly GONE TEOS yellow running Tylan 16 N/A Burn Box Up ZYGO Up GAAS 22 UP GAAS 23 UP SiH4 for furnaces Auto changeover working well A on line 560 PSI -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at snf.stanford.edu Thu May 6 06:42:17 2004 From: tberg at snf.stanford.edu (ted berg) Date: Thu, 06 May 2004 06:42:17 -0700 Subject: Diffusion Morning Report 05/06/04 Message-ID: <409A40B9.5030408@snf.stanford.edu> Good Morning all, Looking pretty good this morning. Nitride is down for pull and clean. LTO is at 30 microns and will be going down on Monday for pull and clean. Poly will likely be going down next week also for pull and clean. We should have final parts for TEOS2 today so we can move on.. Tylan 1 has a bad power supply-waiting for parts from Tystar. Everything else looks OK. Diffusion Date: 5/6/2004 Tube Name/Number Status Comments THICKNESS-Change at Tylan 1 down I/O error-bad PS on Order Tylan 2 Up Tylan 3 Up Tylan 4 Up Tylan 5-BBr3 Up Tylan 6-POCl3 Up Tylan 7-TEOS2 down MFC is installed testing-waiting trap parts Tylan 8-SiGe Up 6.6/30 Tylan 9-Poly Up 27.3/30 Tylan 10-Nitride down pull and clean 0/30 Tylan 11-BPSG-LTO Up 30.13/30 Tylan 12-FGA Up Tystar Up 11.2/30 Doped Poly GONE TEOS yellow running Tylan 16 N/A Burn Box Up ZYGO Up GAAS 22 UP GAAS 23 UP SiH4 for furnaces Auto changeover working well A on line 550 PSI -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at snf.stanford.edu Fri May 7 06:58:37 2004 From: tberg at snf.stanford.edu (ted berg) Date: Fri, 07 May 2004 06:58:37 -0700 Subject: Diffusion Morning Report 05/07/04 Message-ID: <409B960D.6040706@snf.stanford.edu> Good Morning All, Looking good this morning. Nitride is back together and coated waiting for a test. LTO is being vacuumed off and scheduled for Pull and clean on Monday. TEOS 2 is now fully assembled including trap-testing. Power supply for Tylan 1 is on order. Burn box cleaned this morning. Everything else looks OK. Diffusion Date: 5/7/2004 Tube Name/Number Status Comments THICKNESS-Change at Tylan 1 down I/O error-bad PS on Order Tylan 2 Up Tylan 3 Up Tylan 4 Up Tylan 5-BBr3 Up Tylan 6-POCl3 Up Tylan 7-TEOS2 down MFC is installed testing-trap installed Tylan 8-SiGe Up 6.6/30 Tylan 9-Poly Up 27.3/30 Tylan 10-Nitride down coat done- needs test 0/30 Tylan 11-BPSG-LTO Up 30.13/30 Tylan 12-FGA Up Tystar Up 11.2/30 Doped Poly GONE TEOS yellow running Tylan 16 N/A Burn Box Up ZYGO Up GAAS 22 UP GAAS 23 UP SiH4 for furnaces Auto changeover working well A on line 550 PSI -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at snf.stanford.edu Mon May 10 07:44:29 2004 From: tberg at snf.stanford.edu (ted berg) Date: Mon, 10 May 2004 07:44:29 -0700 Subject: Difffusion Morning Report 05/10/04 Message-ID: <409F954D.5090801@snf.stanford.edu> Good Morning All, Looking pretty good this morning. Tylan 1 power supply replaced and looks like it is OK ,testing. Nitride is back up after pull and clean. LTO is down for scheduled pull and clean. Burn box cleaned this morning. TEOS 2 is testing-working out minor bugs. Epi has some issues-investigating Everything else looks OK.ted Diffusion Date: 5/10/2004 Tube Name/Number Status Comments THICKNESS-Change at Tylan 1 yellow power supply replaced needs test Tylan 2 Up Tylan 3 Up Tylan 4 Up Tylan 5-BBr3 Up Tylan 6-POCl3 Up Tylan 7-TEOS2 down MFC is installed testing-trap installed Tylan 8-SiGe Up 6.6/30 Tylan 9-Poly Up 27.7/30 Tylan 10-Nitride Up Particles? 4.8/30 Tylan 11-BPSG-LTO down Pull and clean 0/30 Tylan 12-FGA Up Tystar Up 11.2/30 Doped Poly GONE TEOS yellow running Tylan 16 N/A Burn Box Up Cleaned this morning ZYGO Up GAAS 22 UP GAAS 23 UP SiH4 for furnaces Auto changeover working well A on line 540 PSI -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at snf.stanford.edu Tue May 11 06:55:59 2004 From: tberg at snf.stanford.edu (ted berg) Date: Tue, 11 May 2004 06:55:59 -0700 Subject: Diffusion Morning Report 05/11/04 Message-ID: <40A0DB6F.1010200@snf.stanford.edu> Good Morning All, Looking pretty good this morning. LTO has been pulled and cleaned and coated-waiting for test. Tylan 1 is back up after PS change. TEOS 2 has run a couple of tests-still some recipe tweeking. Are we OK with people having 13 hour blocks of time on Nitride? Not just one user but several. Burn box was positive again this morning after clean yesterday. Everything else looks OK. Diffusion Date: 5/11/2004 Tube Name/Number Status Comments THICKNESS-Change at Tylan 1 Up Tylan 2 Up Tylan 3 Up Tylan 4 Up Tylan 5-BBr3 Up Tylan 6-POCl3 Up Tylan 7-TEOS2 down MFC is installed testing-trap installed Tylan 8-SiGe Up 6.6/30 Tylan 9-Poly Up 27.7/30 Tylan 10-Nitride Up Particles? 7.2/30 Tylan 11-BPSG-LTO yellow Pull and clean-completed needs test .5/30 Tylan 12-FGA Up Tystar Up 11.2/30 Doped Poly GONE TEOS yellow running Tylan 16 N/A Burn Box Up ZYGO Up GAAS 22 UP GAAS 23 UP SiH4 for furnaces Auto changeover working well A on line 540 PSI -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at snf.stanford.edu Wed May 12 07:00:25 2004 From: tberg at snf.stanford.edu (ted berg) Date: Wed, 12 May 2004 07:00:25 -0700 Subject: Diffusion Morning Report 05/12/04 Message-ID: <40A22DF9.8080206@snf.stanford.edu> Good Morning All, Looking Good this morning. LTO is back after pull and clean. Nitride is running-observing particles. TEOS2 is being tested.. Burn box checked this morning. Everything else ok. Diffusion Date: 5/12/2004 Tube Name/Number Status Comments THICKNESS-Change at Tylan 1 Up Tylan 2 Up Tylan 3 Up Tylan 4 Up Tylan 5-BBr3 Up Tylan 6-POCl3 Up Tylan 7-TEOS2 down MFC is installed testing-trap installed Tylan 8-SiGe Up 6.6/30 Tylan 9-Poly Up 27.7/30 Tylan 10-Nitride Up Particles? 7.85/30 Tylan 11-BPSG-LTO Up 1.06/30 Tylan 12-FGA Up Tystar Up 11.2/30 Doped Poly GONE TEOS yellow running Tylan 16 N/A Burn Box Up Checked this morning ZYGO Up GAAS 22 UP GAAS 23 UP SiH4 for furnaces Auto changeover working well A on line 540 PSI -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at snf.stanford.edu Thu May 13 06:37:23 2004 From: tberg at snf.stanford.edu (ted berg) Date: Thu, 13 May 2004 06:37:23 -0700 Subject: Diffusion Morning Report 05/13/04 Message-ID: <40A37A13.1040801@snf.stanford.edu> Good Morning All, Looking Good this morning. Nitride still under observation for defects. TEOS2 ran another test yesterday will run again today. Poly is getting close to pull and clean but is going up very slowly so we are observing. Everything else is ok. Diffusion Date: 5/13/2004 Tube Name/Number Status Comments THICKNESS-Change at Tylan 1 Up Tylan 2 Up Tylan 3 Up Tylan 4 Up Tylan 5-BBr3 Up Tylan 6-POCl3 Up Tylan 7-TEOS2 down MFC is installed testing-trap installed Tylan 8-SiGe Up 6.6/30 Tylan 9-Poly Up 27.7/30 Tylan 10-Nitride Up Particles? 7.85/30 Tylan 11-BPSG-LTO Up 1.23/30 Tylan 12-FGA Up Tystar Up 11.2/30 Doped Poly GONE TEOS yellow running Tylan 16 N/A Burn Box Up ZYGO Up GAAS 22 UP GAAS 23 UP SiH4 for furnaces Auto changeover working well A on line 525 PSI -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at snf.stanford.edu Fri May 14 06:58:39 2004 From: tberg at snf.stanford.edu (ted berg) Date: Fri, 14 May 2004 06:58:39 -0700 Subject: Diffusion Morning Report 05/14/04 Message-ID: <40A4D08F.2020808@snf.stanford.edu> Good Morning All, Looking good this morning. Burn box cleaned this morning. Nitride under observation. TEOS 2 testing. Everything else OK Diffusion Date: 5/14/2004 Tube Name/Number Status Comments THICKNESS-Change at Tylan 1 Up Tylan 2 Up Tylan 3 Up Tylan 4 Up Tylan 5-BBr3 Up Tylan 6-POCl3 Up Tylan 7-TEOS2 down MFC is installed testing-trap installed Tylan 8-SiGe Up 6.6/30 Tylan 9-Poly Up 27.7/30 Tylan 10-Nitride Up Particles? 7.85/30 Tylan 11-BPSG-LTO Up 1.8/30 Tylan 12-FGA Up Tystar Up 11.2/30 Doped Poly GONE TEOS yellow running Tylan 16 N/A Burn Box Up Cleaned this morning ZYGO Up GAAS 22 UP GAAS 23 UP SiH4 for furnaces Auto changeover working well A on line 525 PSI -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at snf.stanford.edu Mon May 17 07:49:20 2004 From: tberg at snf.stanford.edu (ted berg) Date: Mon, 17 May 2004 07:49:20 -0700 Subject: Diffusion Morning report 05/17/04 Message-ID: <40A8D0F0.5020204@snf.stanford.edu> Good Morning All, Looking pretty good this morning. Replaced OT switch on burn box and cleaned it all LPs back up now. Observing Nitride. Testing TEOS2 .. Everything else looking good. Diffusion Date: 5/17/2004 Tube Name/Number Status Comments THICKNESS-Change at Tylan 1 Up Tylan 2 Up Tylan 3 Up Tylan 4 Up Tylan 5-BBr3 Up Tylan 6-POCl3 Up Tylan 7-TEOS2 down MFC is installed testing-trap installed Tylan 8-SiGe Up 6.6/30 Tylan 9-Poly Up 27.9/30 Tylan 10-Nitride Up Particles? 8.3/30 Tylan 11-BPSG-LTO Up 2.03/30 Tylan 12-FGA Up Tystar Up 11.2/30 Doped Poly GONE TEOS yellow running Tylan 16 N/A Burn Box Up Cleaned this morning-replaced OT switch ZYGO Up GAAS 22 UP GAAS 23 UP SiH4 for furnaces Auto changeover working well A on line 525 PSI -------------- next part -------------- An HTML attachment was scrubbed... URL: From seymour at snf.stanford.edu Tue May 18 10:04:22 2004 From: seymour at snf.stanford.edu (Ray Seymour) Date: Tue, 18 May 2004 10:04:22 -0700 Subject: Diffusion Morning report Message-ID: <40AA4216.B4538BFB@snf.stanford.edu> Diffusion Date: 45/18/04 Tube Name/Number Status Comments THICKNESS-Change at Tylan 1 Up Tylan 2 Up Tylan 3 Up Tylan 4 Up Tylan 5-BBr3 Up Tylan 6-POCl3 Up Tylan 7-TEOS2 down MFC installed waiting for RF supply Tylan 8-SiGe up 6.61/30 Tylan 9-Poly Up 28/30 Tylan 10-Nitride yellow particles-clogged soft pump replaced 8.24/30 Tylan 11-BPSG-LTO Up 3.15/30 Tylan 12-FGA Up Tystar Up Doped Poly GONE 11.62/30 TEOS yellow running Tylan 16 N/A Burn Box Up ZYGO Up GAAS 22 UP GAAS 23 UP SiH4 for furnaces Auto changeover working well A on line 520 PSI -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at snf.stanford.edu Wed May 19 06:57:54 2004 From: tberg at snf.stanford.edu (ted berg) Date: Wed, 19 May 2004 06:57:54 -0700 Subject: Diffusion Morning Report 05/19/04 Message-ID: <40AB67E2.2010502@snf.stanford.edu> Good Morning All, Looking pretty good this morning. A few issues- LTO failed leak check - looking into it. Tylan 4 had a MFS alarm N2CARR leak Epi has some issues-looking into. TEOS2 waiting for generator. Everything else looks OK. Diffusion Date: 5/19/2004 Tube Name/Number Status Comments THICKNESS-Change at Tylan 1 Up Tylan 2 Up Tylan 3 Up Tylan 4 Up Tylan 5-BBr3 Up Tylan 6-POCl3 Up Tylan 7-TEOS2 down MFC is installed testing-trap installed Tylan 8-SiGe Up 6.6/30 Tylan 9-Poly Up 28.07/30 Tylan 10-Nitride Up Particles? 8.3/30 Tylan 11-BPSG-LTO down leak 3.3/30 Tylan 12-FGA Up Tystar Up 11.6/30 Doped Poly GONE TEOS yellow running Tylan 16 N/A Burn Box Up Cleaned this morning-replaced OT switch ZYGO Up GAAS 22 UP GAAS 23 UP SiH4 for furnaces Auto changeover working well A on line 520 PSI -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at snf.stanford.edu Thu May 20 06:57:40 2004 From: tberg at snf.stanford.edu (ted berg) Date: Thu, 20 May 2004 06:57:40 -0700 Subject: Diffusion Morning Report 05/20/04 Message-ID: <40ACB954.1060706@snf.stanford.edu> Good Morning All, Looking pretty good this morning. LTO is back up after tube change. Nitride is under observation. Poly is getting close to pull and clean, we will take it down on Tuesday. Epi Has water issue again- looking into it. TEOS 2 still has generator issues. Everything else looks OK. Diffusion Date: 5/20/2004 Tube Name/Number Status Comments THICKNESS-Change at Tylan 1 Up Tylan 2 Up Tylan 3 Up Tylan 4 Up Tylan 5-BBr3 Up Tylan 6-POCl3 Up Tylan 7-TEOS2 down MFC is installed testing-trap installed Tylan 8-SiGe Up 6.6/30 Tylan 9-Poly Up 29.17/30 Tylan 10-Nitride Up Particles? 8.3/30 Tylan 11-BPSG-LTO Up test good .6/30 Tylan 12-FGA Up Tystar Up 11.6/30 Doped Poly GONE TEOS yellow running Tylan 16 N/A Burn Box Up ZYGO Up GAAS 22 UP GAAS 23 UP SiH4 for furnaces Auto changeover working well A on line 520 PSI -------------- next part -------------- An HTML attachment was scrubbed... URL: From seymour at snf.stanford.edu Fri May 21 08:41:06 2004 From: seymour at snf.stanford.edu (Ray Seymour) Date: Fri, 21 May 2004 08:41:06 -0700 Subject: Diffusion Morning Report 5/21/04 Message-ID: <40AE2312.8166B225@snf.stanford.edu> Ted is out this morning. Tylan1 has a problem with the monoblock N2 MFC. I will address that first thing after this report. Mike replaced the broken sheath on BPSG and it is up now. All else looking good. Diffusion Date: 5/21/2004 Tube Name/Number Status Comments THICKNESS-Change at Tylan 1 Down Tylan 2 Up Tylan 3 Up Tylan 4 Up Tylan 5-BBr3 Up Tylan 6-POCl3 Up Tylan 7-TEOS2 down MFC and trap installed testing Tylan 8-SiGe Up 6.61/30 Tylan 9-Poly Up 29.27/30 Tylan 10-Nitride yellow Particles? 8.47/30 Tylan 11-BPSG-LTO Up loader sheath replaced 32.4/30 Tylan 12-FGA Up Tystar Up Doped Poly GONE 11.62/30 TEOS yellow running Tylan 16 N/A Burn Box Up Cleaned this morning ZYGO Up GAAS 22 UP GAAS 23 UP SiH4 for furnaces Auto changeover working well A on line 515 PSI -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at snf.stanford.edu Mon May 24 07:11:12 2004 From: tberg at snf.stanford.edu (ted berg) Date: Mon, 24 May 2004 07:11:12 -0700 Subject: Diffusion MorningReport 05/24/04 Message-ID: <40B20280.8020903@snf.stanford.edu> Good Morning All, Looking Good this morning. Epi had a burn box alarm that prevented operation reset and ran abort and startup. Tylan 1 had I/O error reset Everything else looking OK now. Poly going down tomorrow for pull and clean. Diffusion Date: 5/24/2004 Tube Name/Number Status Comments THICKNESS-Change at Tylan 1 Up Tylan 2 Up Tylan 3 Up Tylan 4 Up Tylan 5-BBr3 Up Tylan 6-POCl3 Up Tylan 7-TEOS2 down MFC is installed testing-trap installed Tylan 8-SiGe Up 6.6/30 Tylan 9-Poly Up 29.4/30 Tylan 10-Nitride Up Particles? 8.47/30 Tylan 11-BPSG-LTO Up 6.75/30 Tylan 12-FGA Up Tystar Up 11.6/30 Doped Poly GONE TEOS yellow running Tylan 16 N/A Burn Box Up ZYGO Up GAAS 22 UP GAAS 23 UP SiH4 for furnaces Auto changeover working well A on line 500 PSI -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at snf.stanford.edu Tue May 25 07:10:00 2004 From: tberg at snf.stanford.edu (ted berg) Date: Tue, 25 May 2004 07:10:00 -0700 Subject: Diffusion Morning Report 05/25/04 Message-ID: <40B353B8.1020006@snf.stanford.edu> Good Morning All, Looking pretty good this morning. Poly is down for scheduled pull and clean. Nitride is still under observation. Tying in generator to TEOS 2. Everything else looking OK. Diffusion Date: 5/25/2004 Tube Name/Number Status Comments THICKNESS-Change at Tylan 1 Up Tylan 2 Up Tylan 3 Up Tylan 4 Up Tylan 5-BBr3 Up Tylan 6-POCl3 Up Tylan 7-TEOS2 down MFC is installed testing-trap installed Tylan 8-SiGe Up 6.6/30 Tylan 9-Poly down Scheduled Pull and Clean 0/30 Tylan 10-Nitride Up Particles? 12.6/30 Tylan 11-BPSG-LTO Up 7.5/30 Tylan 12-FGA Up Tystar Up 11.6/30 Doped Poly GONE TEOS yellow running Tylan 16 N/A Burn Box Up ZYGO Up GAAS 22 UP GAAS 23 UP SiH4 for furnaces Auto changeover working well A on line 500 PSI -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at snf.stanford.edu Wed May 26 07:09:50 2004 From: tberg at snf.stanford.edu (ted berg) Date: Wed, 26 May 2004 07:09:50 -0700 Subject: Diffusion Morning Report 05/26/04 Message-ID: <40B4A52E.1020704@snf.stanford.edu> Good Morning All, A few issues this morning. Poly still down for pull and clean. LTO is down for broken injectors and sheaths. TEOS 2 generator is now integrated into the program so it won't have to be turned on manually. qual testing should begin today.Tylan 1 had mfs alarm but no idea for what- looking into it. Dryer at wbnonmetal now has 6" rotor and is functional. Everything else looks OK for now. > Diffusion Date: 5/26/2004 > Tube Name/Number Status Comments THICKNESS-Change at > Tylan 1 down mfs alarm?? > Tylan 2 Up > Tylan 3 Up > Tylan 4 Up > Tylan 5-BBr3 Up > Tylan 6-POCl3 Up > Tylan 7-TEOS2 down Qual testing to begin > Tylan 8-SiGe Up 6.6/30 > Tylan 9-Poly down Scheduled Pull and Clean 0/30 > Tylan 10-Nitride Up Particles? 12.6/30 > Tylan 11-BPSG-LTO down Broken TC sheath and injectors 7.5/30 > Tylan 12-FGA Up > Tystar Up 11.6/30 > Doped Poly GONE > TEOS yellow running > Tylan 16 N/A > Burn Box Up > ZYGO Up > > GAAS 22 UP > GAAS 23 UP > > SiH4 for furnaces Auto changeover working well A on line 500 PSI > -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at snf.stanford.edu Thu May 27 06:37:30 2004 From: tberg at snf.stanford.edu (ted berg) Date: Thu, 27 May 2004 06:37:30 -0700 Subject: Diffusion Morning Report 05/27/04 Message-ID: <40B5EF1A.1000704@snf.stanford.edu> Good Morning all, Looking fair this morning, BPSG is back together after replacing TC sheaths and injectors- needs a test. Poly is waiting for a tube to change. TEOS 2 began testing looks like recipe will need some tweeks. Nitride still under observation. Everything else looiking OK Diffusion Date: 5/27/2004 Tube Name/Number Status Comments THICKNESS-Change at Tylan 1 Up Tylan 2 Up Tylan 3 Up Tylan 4 Up Tylan 5-BBr3 Up Tylan 6-POCl3 Up Tylan 7-TEOS2 down Qual testing to begin Tylan 8-SiGe Up 6.6/30 Tylan 9-Poly down Scheduled Pull and Clean 0/30 Tylan 10-Nitride Up Particles? 12.6/30 Tylan 11-BPSG-LTO yellow needs test 7.5/30 Tylan 12-FGA Up Tystar Up 12.6/30 Doped Poly GONE TEOS yellow running Tylan 16 N/A Burn Box Up ZYGO Up GAAS 22 UP GAAS 23 UP SiH4 for furnaces Auto changeover working well A on line 500 PSI -------------- next part -------------- An HTML attachment was scrubbed... URL: From seymour at snf.stanford.edu Fri May 28 08:22:12 2004 From: seymour at snf.stanford.edu (Ray Seymour) Date: Fri, 28 May 2004 08:22:12 -0700 Subject: Diffusion Morning Report 5/28/04 Message-ID: <40B75924.21237C1A@snf.stanford.edu> Ted is out this morning. Poly and BPSG are both up. TEOS qual is under way. Nitride under observation. All else looking good Diffusion Date: 5/28/2004 Tube Name/Number Status Comments THICKNESS-Change at Tylan 1 Up Tylan 2 Up Tylan 3 Up Tylan 4 Up Tylan 5-BBr3 Up Tylan 6-POCl3 Up Tylan 7-TEOS2 Down Qual testing to begin Tylan 8-SiGe Up 6.61/30 Tylan 9-Poly Up 0.18/30 Tylan 10-Nitride yellow Particles? 12.88/30 Tylan 11-BPSG-LTO Up 7.94/30 Tylan 12-FGA Up Tystar Up 13.22/30 Doped Poly GONE TEOS yellow running Tylan 16 N/A Cleaned this morning ZYGO Up GAAS 22 UP GAAS 23 UP SiH4 for furnaces Auto changeover working well A on line 500 PSI -------------- next part -------------- An HTML attachment was scrubbed... URL: