Diffusion Morning Report 05/03/04

ted berg tberg at snf.stanford.edu
Mon May 3 06:46:45 PDT 2004

Good Morning All,
    Looking pretty good this morning.  Burn box pressure is quite high 
+4 but someone is running it until 11:00am-numerous long runs
scheduled in reservations-whats up?? Tylan 1 still down for I/O error 
board on the way from Tystar.  TEOS2 MFC is here and installed
testing. Nitride still under observation.  Everything else looking OK.

Diffusion 	Date: 	5/32004 	 
Tube Name/Number 	Status 	Comments 	THICKNESS-Change at
Tylan 1 	down 	I/O error 	 
Tylan 2 	Up 	  	 
Tylan 3 	Up 	  	 
Tylan 4 	Up 	  	 
Tylan 5-BBr3 	Up 	  	 
Tylan 6-POCl3 	Up 	  	 
Tylan 7-TEOS2 	down 	MFC is  installed testing 	 
Tylan 8-SiGe 	Up 	  	6.6/30
Tylan 9-Poly 	Up 	  	26.3/30
Tylan 10-Nitride 	yellow 	particles-better??; 	19.5+/30
Tylan 11-BPSG-LTO 	Up 	  	25.7/30
Tylan 12-FGA 	Up 	  	 
Tystar 	Up 	  	11.2/30
Doped Poly 	GONE 	  	 
TEOS 	yellow 	 running 	 
Tylan 16 	N/A 	  	 
Burn Box 	Up 	very high pressure 	 
ZYGO 	Up 	  	 
GAAS 22 	UP 	  	 
GAAS 23 	UP 	  	 
SiH4 for furnaces 	  	Auto changeover working well 	A on line 580 PSI

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