Diffusion Morning Report05/05/04

ted berg tberg at snf.stanford.edu
Wed May 5 07:13:24 PDT 2004

Happy Cinco de Mayo,
    Looking pretty good this morning.  Long runs mean Nitride will be 
going down tomorrow morning- had to bump a few people.  LTO will
be going down Monday morning for pull and clean.  TEOS 2 plasma trap 
parts should be here tomorrow, recipe has been modified per TEOS user 
Everything else looking good.

Diffusion 	Date: 	5/5/2004 	 
Tube Name/Number 	Status 	Comments 	THICKNESS-Change at
Tylan 1 	down 	I/O error 	 
Tylan 2 	Up 	  	 
Tylan 3 	Up 	  	 
Tylan 4 	Up 	  	 
Tylan 5-BBr3 	Up 	  	 
Tylan 6-POCl3 	Up 	  	 
Tylan 7-TEOS2 	down 	MFC is  installed testing 	 
Tylan 8-SiGe 	Up 	  	6.6/30
Tylan 9-Poly 	Up 	  	27.3/30
Tylan 10-Nitride 	yellow 	particles-better??;long runs? 	28.4/30
Tylan 11-BPSG-LTO 	Up 	  	26.6/30
Tylan 12-FGA 	Up 	  	 
Tystar 	Up 	  	11.2/30
Doped Poly 	GONE 	  	 
TEOS 	yellow 	 running 	 
Tylan 16 	N/A 	  	 
Burn Box 	Up 	  	 
ZYGO 	Up 	  	 
GAAS 22 	UP 	  	 
GAAS 23 	UP 	  	 
SiH4 for furnaces 	  	Auto changeover working well 	A on line 560 PSI

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