Diffusion Morning Report 05/06/04

ted berg tberg at snf.stanford.edu
Thu May 6 06:42:17 PDT 2004

Good Morning all,
    Looking pretty good this morning.  Nitride is down for pull and 
clean. LTO is at 30 microns and will be going down on Monday for pull
and clean. Poly will likely be going down next week also for pull and 
clean.  We should have final parts for TEOS2 today so we can move on..
Tylan 1 has a bad power supply-waiting for parts from Tystar.  
Everything else looks OK.

Diffusion 	Date: 	5/6/2004 	 
Tube Name/Number 	Status 	Comments 	THICKNESS-Change at
Tylan 1 	down 	I/O error-bad PS on Order 	 
Tylan 2 	Up 	  	 
Tylan 3 	Up 	  	 
Tylan 4 	Up 	  	 
Tylan 5-BBr3 	Up 	  	 
Tylan 6-POCl3 	Up 	  	 
Tylan 7-TEOS2 	down 	MFC is installed testing-waiting trap parts 	 
Tylan 8-SiGe 	Up 	  	6.6/30
Tylan 9-Poly 	Up 	  	27.3/30
Tylan 10-Nitride 	down 	pull and clean 	0/30
Tylan 11-BPSG-LTO 	Up 	  	30.13/30
Tylan 12-FGA 	Up 	  	 
Tystar 	Up 	  	11.2/30
Doped Poly 	GONE 	  	 
TEOS 	yellow 	 running 	 
Tylan 16 	N/A 	  	 
Burn Box 	Up 	  	 
ZYGO 	Up 	  	 
GAAS 22 	UP 	  	 
GAAS 23 	UP 	  	 
SiH4 for furnaces 	  	Auto changeover working well 	A on line 550 PSI

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