Diffusion Morning Report 05/11/04

ted berg tberg at snf.stanford.edu
Tue May 11 06:55:59 PDT 2004

Good Morning All,
    Looking pretty good this morning.  LTO has been pulled and cleaned 
and coated-waiting for test. Tylan 1 is back up after PS change.
TEOS 2 has run a couple of tests-still some recipe tweeking.  Are we OK 
with people having 13 hour blocks of time on Nitride?  Not
just one user but several.  Burn box was positive again this morning 
after clean yesterday.  Everything else looks OK.

Diffusion 	Date: 	5/11/2004 	 
Tube Name/Number 	Status 	Comments 	THICKNESS-Change at
Tylan 1 	Up 	  	 
Tylan 2 	Up 	  	 
Tylan 3 	Up 	  	 
Tylan 4 	Up 	  	 
Tylan 5-BBr3 	Up 	  	 
Tylan 6-POCl3 	Up 	  	 
Tylan 7-TEOS2 	down 	MFC is installed testing-trap installed 	 
Tylan 8-SiGe 	Up 	  	6.6/30
Tylan 9-Poly 	Up 	  	27.7/30
Tylan 10-Nitride 	Up 	Particles? 	7.2/30
Tylan 11-BPSG-LTO 	yellow 	Pull and clean-completed needs test 	.5/30
Tylan 12-FGA 	Up 	  	 
Tystar 	Up 	  	11.2/30
Doped Poly 	GONE 	  	 
TEOS 	yellow 	 running 	 
Tylan 16 	N/A 	  	 
Burn Box 	Up 	  	 
ZYGO 	Up 	  	 
GAAS 22 	UP 	  	 
GAAS 23 	UP 	  	 
SiH4 for furnaces 	  	Auto changeover working well 	A on line 540 PSI

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