Diffusion Morning report

Ray Seymour seymour at snf.stanford.edu
Tue May 18 10:04:22 PDT 2004


Diffusion Date: 45/18/04
Tube Name/Number Status
Comments                                     THICKNESS-Change at
Tylan 1 Up
Tylan 2 Up
Tylan 3 Up
Tylan 4 Up
Tylan 5-BBr3 Up
Tylan 6-POCl3 Up
Tylan 7-TEOS2 down                      MFC installed waiting for RF
supply
Tylan 8-SiGe
up
6.61/30
Tylan 9-Poly
Up
28/30
Tylan 10-Nitride yellow                    particles-clogged soft pump
replaced      8.24/30
Tylan 11-BPSG-LTO
Up
3.15/30
Tylan 12-FGA Up
Tystar Up
Doped Poly
GONE
11.62/30
TEOS yellow  running
Tylan 16 N/A
Burn Box Up
ZYGO Up

GAAS 22 UP
GAAS 23 UP

SiH4 for furnaces                             Auto changeover working
well  A on line 520 PSI






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