Diffusion Morning Report 05/19/04

ted berg tberg at snf.stanford.edu
Wed May 19 06:57:54 PDT 2004


Good Morning All,
    Looking pretty good this morning. A few issues- LTO failed leak 
check - looking into it.  Tylan 4 had a  MFS alarm  N2CARR leak
Epi has some issues-looking into.  TEOS2 waiting for generator.  
Everything else looks OK.

Diffusion 	Date: 	5/19/2004 	 
Tube Name/Number 	Status 	Comments 	THICKNESS-Change at
Tylan 1 	Up 	  	 
Tylan 2 	Up 	  	 
Tylan 3 	Up 	  	 
Tylan 4 	Up 	  	 
Tylan 5-BBr3 	Up 	  	 
Tylan 6-POCl3 	Up 	  	 
Tylan 7-TEOS2 	down 	MFC is installed testing-trap installed 	 
Tylan 8-SiGe 	Up 	  	6.6/30
Tylan 9-Poly 	Up 	  	28.07/30
Tylan 10-Nitride 	Up 	Particles? 	8.3/30
Tylan 11-BPSG-LTO 	down 	leak 	3.3/30
Tylan 12-FGA 	Up 	  	 
Tystar 	Up 	  	11.6/30
Doped Poly 	GONE 	  	 
TEOS 	yellow 	 running 	 
Tylan 16 	N/A 	  	 
Burn Box 	Up 	Cleaned this morning-replaced OT switch 	 
ZYGO 	Up 	  	 
  	  	  	 
GAAS 22 	UP 	  	 
GAAS 23 	UP 	  	 
  	  	  	 
SiH4 for furnaces 	  	Auto changeover working well 	A on line 520 PSI




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