Diffusion Morning Report 5/21/04

Ray Seymour seymour at snf.stanford.edu
Fri May 21 08:41:06 PDT 2004

Ted is out this morning. Tylan1 has a problem with the monoblock N2 MFC.
I will address that first thing after this report. Mike replaced the
broken sheath on BPSG and it is up now. All else looking good.

Diffusion                     Date:                    5/21/2004
Tube Name/Number    Status
Comments                                      THICKNESS-Change at
Tylan 1                       Down
Tylan 2                       Up
Tylan 3                       Up
Tylan 4                       Up
Tylan 5-BBr3              Up
Tylan 6-POCl3            Up
Tylan 7-TEOS2           down                      MFC and trap installed
Tylan 8-SiGe
Tylan 9-Poly
Tylan 10-Nitride          yellow
Particles?                                          8.47/30
Tylan 11-BPSG-LTO  Up                           loader sheath
replaced                     32.4/30
Tylan 12-FGA            Up
Tystar Up
Doped Poly
TEOS                        yellow                       running
Tylan 16 N/A
Burn Box                   Up                            Cleaned this
ZYGO                       Up

GAAS 22                   UP
GAAS 23                   UP

SiH4 for furnaces                                       Auto changeover
working well  A on line 515 PSI

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