Diffusion MorningReport 05/24/04

ted berg tberg at snf.stanford.edu
Mon May 24 07:11:12 PDT 2004

Good Morning All,
    Looking Good this morning.  Epi had a burn box alarm that prevented 
operation reset and ran abort and startup.  Tylan 1 had I/O error  reset
Everything else looking OK now.  Poly going down tomorrow for pull and 

Diffusion 	Date: 	5/24/2004 	 
Tube Name/Number 	Status 	Comments 	THICKNESS-Change at
Tylan 1 	Up 	  	 
Tylan 2 	Up 	  	 
Tylan 3 	Up 	  	 
Tylan 4 	Up 	  	 
Tylan 5-BBr3 	Up 	  	 
Tylan 6-POCl3 	Up 	  	 
Tylan 7-TEOS2 	down 	MFC is installed testing-trap installed 	 
Tylan 8-SiGe 	Up 	  	6.6/30
Tylan 9-Poly 	Up 	  	29.4/30
Tylan 10-Nitride 	Up 	Particles? 	8.47/30
Tylan 11-BPSG-LTO 	Up 	  	6.75/30
Tylan 12-FGA 	Up 	  	 
Tystar 	Up 	  	11.6/30
Doped Poly 	GONE 	  	 
TEOS 	yellow 	 running 	 
Tylan 16 	N/A 	  	 
Burn Box 	Up 	  	 
ZYGO 	Up 	  	 
GAAS 22 	UP 	  	 
GAAS 23 	UP 	  	 
SiH4 for furnaces 	  	Auto changeover working well 	A on line 500 PSI

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