Diffusion Morning Report 05/25/04

ted berg tberg at snf.stanford.edu
Tue May 25 07:10:00 PDT 2004

Good Morning All,
    Looking pretty good this morning. Poly is down for scheduled pull 
and clean. Nitride is still under observation. Tying in generator to TEOS 2.
Everything else looking OK.

Diffusion 	Date: 	5/25/2004 	 
Tube Name/Number 	Status 	Comments 	THICKNESS-Change at
Tylan 1 	Up 	  	 
Tylan 2 	Up 	  	 
Tylan 3 	Up 	  	 
Tylan 4 	Up 	  	 
Tylan 5-BBr3 	Up 	  	 
Tylan 6-POCl3 	Up 	  	 
Tylan 7-TEOS2 	down 	MFC is installed testing-trap installed 	 
Tylan 8-SiGe 	Up 	  	6.6/30
Tylan 9-Poly 	down 	Scheduled Pull and Clean 	0/30
Tylan 10-Nitride 	Up 	Particles? 	12.6/30
Tylan 11-BPSG-LTO 	Up 	  	7.5/30
Tylan 12-FGA 	Up 	  	 
Tystar 	Up 	  	11.6/30
Doped Poly 	GONE 	  	 
TEOS 	yellow 	 running 	 
Tylan 16 	N/A 	  	 
Burn Box 	Up 	  	 
ZYGO 	Up 	  	 
GAAS 22 	UP 	  	 
GAAS 23 	UP 	  	 
SiH4 for furnaces 	  	Auto changeover working well 	A on line 500 PSI

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