Diffusion Morning Report 05/26/04

ted berg tberg at snf.stanford.edu
Wed May 26 07:09:50 PDT 2004


Good Morning All,
    A few issues this morning. Poly still down for pull and clean. LTO 
is down for broken injectors and sheaths.  TEOS 2 generator is now 
integrated into the
program so it won't have to be turned on manually.  qual testing should 
begin today.Tylan 1 had mfs alarm but no idea  for what- looking into 
it.  Dryer at wbnonmetal
now has 6" rotor and is functional.  Everything else looks OK for now.

> Diffusion 	Date: 	5/26/2004 	 
> Tube Name/Number 	Status 	Comments 	THICKNESS-Change at
> Tylan 1 	down 	mfs alarm?? 	 
> Tylan 2 	Up 	  	 
> Tylan 3 	Up 	  	 
> Tylan 4 	Up 	  	 
> Tylan 5-BBr3 	Up 	  	 
> Tylan 6-POCl3 	Up 	  	 
> Tylan 7-TEOS2 	down 	Qual testing to begin 	 
> Tylan 8-SiGe 	Up 	  	6.6/30
> Tylan 9-Poly 	down 	Scheduled Pull and Clean 	0/30
> Tylan 10-Nitride 	Up 	Particles? 	12.6/30
> Tylan 11-BPSG-LTO 	down 	Broken TC sheath and injectors 	7.5/30
> Tylan 12-FGA 	Up 	  	 
> Tystar 	Up 	  	11.6/30
> Doped Poly 	GONE 	  	 
> TEOS 	yellow 	 running 	 
> Tylan 16 	N/A 	  	 
> Burn Box 	Up 	  	 
> ZYGO 	Up 	  	 
>   	  	  	 
> GAAS 22 	UP 	  	 
> GAAS 23 	UP 	  	 
>   	  	  	 
> SiH4 for furnaces 	  	Auto changeover working well 	A on line 500 PSI
>

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