Diffusion Morning Report 5/28/04

Ray Seymour seymour at snf.stanford.edu
Fri May 28 08:22:12 PDT 2004


Ted is out this morning. Poly and BPSG are both up. TEOS qual is under
way. Nitride under observation. All else looking good


Diffusion                     Date:
5/28/2004
Tube Name/Number     Status
Comments                                  THICKNESS-Change at
Tylan 1                         Up
Tylan 2                         Up
Tylan 3                         Up
Tylan 4                         Up
Tylan 5-BBr3                Up
Tylan 6-POCl3              Up
Tylan 7-TEOS2             Down                               Qual
testing to begin
Tylan 8-SiGe
Up
6.61/30
Tylan 9-Poly
Up
0.18/30
Tylan 10-Nitride             yellow
Particles?                                        12.88/30
Tylan 11-BPSG-LTO
Up
7.94/30
Tylan 12-FGA                Up
Tystar
Up
13.22/30
Doped Poly                    GONE
TEOS                            yellow running
Tylan 16                         N/A
Cleaned this morning
ZYGO                           Up

GAAS 22                       UP
GAAS 23                       UP

SiH4 for furnaces                                                  Auto
changeover working well  A on line 500 PSI



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