From tberg at snf.stanford.edu Mon Nov 1 06:35:07 2004 From: tberg at snf.stanford.edu (Ted Berg) Date: Mon, 01 Nov 2004 06:35:07 -0800 Subject: Diffusion Morning Report 11/01/04 Message-ID: <4186499B.8060802@snf.stanford.edu> Good Morning All, Looking pretty good this morning. Tylan 2 had a temp issue -looking into it. Nitride and Poly still under observation. TEOS2 and Thermco Poly are testing. Everything else looks ok for now. . Date: 11/1/2004 Tube Name/Number Status Comments THICKNESS-Change at Tylan 1 Up Tylan 2 yellow Load temp problem Tylan 3 Up Tylan 4 Up Tylan 5-BBr3 Up Tylan 6-POCl3 Up Tylan 7-TEOS2 down Qual testing Tylan 8-SiGe Up 12.33/30 Tylan 9-Poly yellow observation 17.8/30 Tylan 10-Nitride yellow observation 7.36/30 Tylan 11-BPSG-LTO Up 1.16/30 Tylan 12-FGA Up Tystar Up 11.2/30 Doped Poly GONE TEOS up Tylan 16 N/A Thermco 1 Up Thermco 2 Up Thermco Poly yellow Testing Thermco Nitride Down Waiting Burn Box Up ZYGO up GAAS 22 UP GAAS 23 UP SiH4 for furnaces Auto changeover working well B on line 440 PSI -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at snf.stanford.edu Tue Nov 2 06:22:50 2004 From: tberg at snf.stanford.edu (Ted Berg) Date: Tue, 02 Nov 2004 06:22:50 -0800 Subject: Diffusion Morning Report 11/02/04 Message-ID: <4187983A.5070006@snf.stanford.edu> Good Morning All, Happy Election Day-hope everyone has a chance to vote today. Looking good this morning. Nitride and poly still under observation. TEOS2 and Thermco poly testing. DCS for Tylan nitride will be replaced next Tuesday so please plan accordingly. Everything else looks OK for now. . Date: 11/2/2004 Tube Name/Number Status Comments THICKNESS-Change at Tylan 1 Up Tylan 2 Up Tylan 3 Up Tylan 4 Up Tylan 5-BBr3 Up Tylan 6-POCl3 Up Tylan 7-TEOS2 down Qual testing Tylan 8-SiGe Up 12.33/30 Tylan 9-Poly yellow observation 17.8/30 Tylan 10-Nitride yellow observation 7.36/30 Tylan 11-BPSG-LTO Up 1.2/30 Tylan 12-FGA Up Tystar Up 11.2/30 Doped Poly GONE TEOS up Tylan 16 N/A Thermco 1 Up Thermco 2 Up Thermco Poly yellow Testing Thermco Nitride Down Waiting Burn Box Up ZYGO up GAAS 22 UP GAAS 23 UP SiH4 for furnaces Auto changeover working well B on line 430 PSI -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at snf.stanford.edu Wed Nov 3 07:26:30 2004 From: tberg at snf.stanford.edu (Ted Berg) Date: Wed, 03 Nov 2004 07:26:30 -0800 Subject: Diffusion Morning Report 11/03/04 Message-ID: <4188F8A6.60202@snf.stanford.edu> Good Morning All, Looking OK this morning. Nitride and poly are still under observation. TEOS2 and Thermco Poly are testing. DCS for Nitride will be changed next Tuesday so plan accordingly. Everything else looks ok for now. . Date: 11/3/2004 Tube Name/Number Status Comments THICKNESS-Change at Tylan 1 Up Tylan 2 Up Tylan 3 Up Tylan 4 Up Tylan 5-BBr3 Up Tylan 6-POCl3 Up Tylan 7-TEOS2 down Qual testing Tylan 8-SiGe Up 12.33/30 Tylan 9-Poly yellow observation 18.0/30 Tylan 10-Nitride yellow observation 8.41/30 Tylan 11-BPSG-LTO Up 1.6/30 Tylan 12-FGA Up Tystar Up 11.2/30 Doped Poly GONE TEOS up Tylan 16 N/A Thermco 1 Up Thermco 2 Up Thermco Poly yellow Testing Thermco Nitride Down Waiting Burn Box Up ZYGO up GAAS 22 UP GAAS 23 UP SiH4 for furnaces Auto changeover working well B on line 405 PSI -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at snf.stanford.edu Thu Nov 4 06:45:07 2004 From: tberg at snf.stanford.edu (Ted Berg) Date: Thu, 04 Nov 2004 06:45:07 -0800 Subject: Diffusion Morning Report 11/04/04 Message-ID: <418A4073.1020103@snf.stanford.edu> Good Morning All, Looking OK this morning. Poly still under observation. Nitride pump was off this morning-looking into it. TEOS2 and Thermco poly testing. Everything else looks OK for now. . Date: 11/4/2004 Tube Name/Number Status Comments THICKNESS-Change at Tylan 1 Up Tylan 2 Up Tylan 3 Up Tylan 4 Up Tylan 5-BBr3 Up Tylan 6-POCl3 Up Tylan 7-TEOS2 down Qual testing Tylan 8-SiGe Up 12.33/30 Tylan 9-Poly yellow observation 18.0/30 Tylan 10-Nitride yellow observation-pump off 10.49/30 Tylan 11-BPSG-LTO Up 4.05/30 Tylan 12-FGA Up Tystar Up 11.2/30 Doped Poly GONE TEOS up Tylan 16 N/A Thermco 1 Up Thermco 2 Up Thermco Poly yellow Testing Thermco Nitride Down Waiting Burn Box Up ZYGO up GAAS 22 UP GAAS 23 UP SiH4 for furnaces Auto changeover working well B on line 380 PSI -------------- next part -------------- An HTML attachment was scrubbed... URL: From nanotech at nsti.org Thu Nov 4 17:00:24 2004 From: nanotech at nsti.org (Nanotech 2005) Date: Thu, 4 Nov 2004 17:00:24 -0800 Subject: Nanotech 2005 Abstract Deadline Message-ID: An HTML attachment was scrubbed... URL: From seymour at snf.stanford.edu Fri Nov 5 08:11:47 2004 From: seymour at snf.stanford.edu (Ray Seymour) Date: Fri, 05 Nov 2004 08:11:47 -0800 Subject: Diffusion Morning Report Message-ID: <418BA643.B98E5A41@snf.stanford.edu> Morning all, Ted is out today. Diffusion is looking good this morning. Nitride pump change went well, and tube is under observation for particles as before. Poly is under observation also. The rest are running fine. Have a great weekend. Diffusion Date: 11/52004 Tube Name/Number Status Comments THICKNESS-Change at Tylan 1 Up Tylan 2 Up Tylan 3 Up Tylan 4 Up Tylan 5-BBr3 Up Tylan 6-POCl3 Up Tylan 7-TEOS2 down Qual testing Tylan 8-SiGe Up 12.33/30 Tylan 9-Poly Yellow observation 18/30 Tylan 10-Nitride Yellow observation 10.99/30 Tylan 11-BPSG-LTO Up 4.55/30 Tylan 12-FGA Up Tystar Up 14.2/30 Doped Poly GONE TEOS Yellow Tylan 16 N/A Yhermco 1 UP Thermco 1 UP Thermco Poly Yellow Testing Thermco Nitride Down Waiting Burn Box Up Cleaned this morning ZYGO Up GAAS 22 UP GAAS 23 UP SiH4 for furnaces Auto changeover working well B on line 360 PSI -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at snf.stanford.edu Mon Nov 8 07:20:01 2004 From: tberg at snf.stanford.edu (Ted Berg) Date: Mon, 08 Nov 2004 07:20:01 -0800 Subject: Diffusion Morning Report 11/08/04 Message-ID: <418F8EA1.4040804@snf.stanford.edu> Good Morning all, Looking pretty good this morning. Nitride and Poly still under observation. TEOS2 and Thermco poly still testing. DCS for nitride will be changed tomotrrow morning. Everything else looks OK for now. . Date: 11/8/2004 Tube Name/Number Status Comments THICKNESS-Change at Tylan 1 Up Tylan 2 Up Tylan 3 Up Tylan 4 Up Tylan 5-BBr3 Up Tylan 6-POCl3 Up Tylan 7-TEOS2 down Qual testing Tylan 8-SiGe Up 12.33/30 Tylan 9-Poly yellow observation 19.3/30 Tylan 10-Nitride yellow observation 11.1/30 Tylan 11-BPSG-LTO Up 5.6/30 Tylan 12-FGA Up Tystar Up 14.2/30 Doped Poly GONE TEOS up Tylan 16 N/A Thermco 1 Up Thermco 2 Up Thermco Poly yellow Testing Thermco Nitride Down Waiting Burn Box Up ZYGO up GAAS 22 UP GAAS 23 UP SiH4 for furnaces Auto changeover working well B on line 360 PSI -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at snf.stanford.edu Tue Nov 9 06:46:11 2004 From: tberg at snf.stanford.edu (Ted Berg) Date: Tue, 09 Nov 2004 06:46:11 -0800 Subject: Diffusion Morning Report 11/09/04 Message-ID: <4190D833.70504@snf.stanford.edu> Good Morning All, Looking Good this morning. Nitride is down for DCS change. GeH4 for Epi completed. Poly and Nitride still under observation. TEOS2 and Thermco Poly testing. Everything else looks ok for now. . Date: 11/9/2004 Tube Name/Number Status Comments THICKNESS-Change at Tylan 1 Up Tylan 2 Up Tylan 3 Up Tylan 4 Up Tylan 5-BBr3 Up Tylan 6-POCl3 Up Tylan 7-TEOS2 down Qual testing Tylan 8-SiGe Up 12.88/30 Tylan 9-Poly yellow observation 19.3/30 Tylan 10-Nitride yellow observation 13.35/30 Tylan 11-BPSG-LTO Up 5.6/30 Tylan 12-FGA Up Tystar Up 15.1/30 Doped Poly GONE TEOS up Tylan 16 N/A Thermco 1 Up Thermco 2 Up Thermco Poly yellow Testing Thermco Nitride Down Waiting Burn Box Up ZYGO up GAAS 22 UP GAAS 23 UP SiH4 for furnaces Auto changeover working well B on line 350 PSI -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at snf.stanford.edu Wed Nov 10 06:33:12 2004 From: tberg at snf.stanford.edu (Ted Berg) Date: Wed, 10 Nov 2004 06:33:12 -0800 Subject: Diffusion Morning Report 11/10/04 Message-ID: <419226A8.8090205@snf.stanford.edu> Good Morning All, Looking good this morning. DCS change went well and will be turn back on today. Poly and Nitride still under observation. TEOS2 and Thermco poly testing. Everything else looks OK for now. . Date: 11/9/2004 Tube Name/Number Status Comments THICKNESS-Change at Tylan 1 Up Tylan 2 Up Tylan 3 Up Tylan 4 Up Tylan 5-BBr3 Up Tylan 6-POCl3 Up Tylan 7-TEOS2 down Qual testing Tylan 8-SiGe Up 12.88/30 Tylan 9-Poly yellow observation 19.3/30 Tylan 10-Nitride yellow observation 13.35/30 Tylan 11-BPSG-LTO Up 6.1/30 Tylan 12-FGA Up Tystar Up 16.3/30 Doped Poly GONE TEOS up Tylan 16 N/A Thermco 1 Up Thermco 2 Up Thermco Poly yellow Testing Thermco Nitride Down Waiting Burn Box Up ZYGO up GAAS 22 UP GAAS 23 UP SiH4 for furnaces Auto changeover working well B on line 320 PSI -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at snf.stanford.edu Thu Nov 11 07:17:04 2004 From: tberg at snf.stanford.edu (Ted Berg) Date: Thu, 11 Nov 2004 07:17:04 -0800 Subject: Diffusion Morning Report 11/11/04 Message-ID: <41938270.5010500@snf.stanford.edu> Good Morning All, Looking pretty good this morning. Had a power glitch last night some tools effected. NH3 for Nitride was off -back on now. Poly is under observation. TEOS2 and Thermco poly testing. Everything else looks OK for now. . Date: 11/10/2004 Tube Name/Number Status Comments THICKNESS-Change at Tylan 1 Up Tylan 2 Up Tylan 3 Up Tylan 4 Up Tylan 5-BBr3 Up Tylan 6-POCl3 Up Tylan 7-TEOS2 down Qual testing Tylan 8-SiGe Up 12.88/30 Tylan 9-Poly yellow observation 19.3/30 Tylan 10-Nitride Up NH3 Problem after power glitch 13.66/30 Tylan 11-BPSG-LTO Up 8.62/30 Tylan 12-FGA Up Tystar Up 16.3/30 Doped Poly GONE TEOS up Tylan 16 N/A Thermco 1 Up Thermco 2 Up Thermco Poly yellow Testing Thermco Nitride Down Waiting Burn Box Up ZYGO up GAAS 22 UP GAAS 23 UP SiH4 for furnaces Auto changeover working well B on line 320 PSI -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at snf.stanford.edu Fri Nov 12 06:40:32 2004 From: tberg at snf.stanford.edu (Ted Berg) Date: Fri, 12 Nov 2004 06:40:32 -0800 Subject: Diffusion Morning Report 11/12/04 Message-ID: <4194CB60.9040909@snf.stanford.edu> Good Morning All, Looking pretty good this morning. Poly under observation. Nitride had some particles. TEOS2 and Thermco Poly testing. Burnbox cleaned this morning. Everything else looks OK for now. . Date: 11/12/2004 Tube Name/Number Status Comments THICKNESS-Change at Tylan 1 Up Tylan 2 Up Tylan 3 Up Tylan 4 Up Tylan 5-BBr3 Up Tylan 6-POCl3 Up Tylan 7-TEOS2 down Qual testing Tylan 8-SiGe Up 12.88/30 Tylan 9-Poly yellow observation 19.44/30 Tylan 10-Nitride Up 15.14/30 Tylan 11-BPSG-LTO Up 12.28/30 Tylan 12-FGA Up Tystar Up 16.3/30 Doped Poly GONE TEOS up Tylan 16 N/A Thermco 1 Up Thermco 2 Up Thermco Poly yellow Testing Thermco Nitride Down Waiting Burn Box Up Cleaned this morning ZYGO up GAAS 22 UP GAAS 23 UP SiH4 for furnaces Auto changeover working well B on line 310 PSI -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at snf.stanford.edu Mon Nov 15 07:04:34 2004 From: tberg at snf.stanford.edu (Ted Berg) Date: Mon, 15 Nov 2004 07:04:34 -0800 Subject: Diffusion Morning Report 11/15/04 Message-ID: <4198C582.20503@snf.stanford.edu> Good Morning All, Looking pretty good this morning. Tylan Nitride and Poly still under observation. TEOS2 and Thermco Poly testing. Evberything else looks OK for now. . Date: 11/15/2004 Tube Name/Number Status Comments THICKNESS-Change at Tylan 1 Up Tylan 2 Up Tylan 3 Up Tylan 4 Up Tylan 5-BBr3 Up Tylan 6-POCl3 Up Tylan 7-TEOS2 down Qual testing Tylan 8-SiGe Up 12.88/30 Tylan 9-Poly yellow observation 19.44/30 Tylan 10-Nitride Up 17.14/30 Tylan 11-BPSG-LTO Up 16.3/30 Tylan 12-FGA Up Tystar Up 16.3/30 Doped Poly GONE TEOS up Tylan 16 N/A Thermco 1 Up Thermco 2 Up Thermco Poly yellow Testing Thermco Nitride Down Waiting Burn Box Up ZYGO up GAAS 22 UP GAAS 23 UP SiH4 for furnaces Auto changeover working well B on line 310 PSI -------------- next part -------------- An HTML attachment was scrubbed... URL: From nanotech at nsti.org Mon Nov 15 20:23:44 2004 From: nanotech at nsti.org (Nanotech 2005) Date: Mon, 15 Nov 2004 20:23:44 -0800 Subject: Friday Abstract Deadline - Nanotech 2005 Message-ID: An HTML attachment was scrubbed... URL: From tberg at snf.stanford.edu Tue Nov 16 06:33:02 2004 From: tberg at snf.stanford.edu (Ted Berg) Date: Tue, 16 Nov 2004 06:33:02 -0800 Subject: Difffusion Morning Report 11/16/04 Message-ID: <419A0F9E.3050800@snf.stanford.edu> Good Morning All, Looking Good this morning. Burn box pressure was high-cleaning this morning. Nitride and Poly under observation. TEOS2 and Thermco poly testing. Everything else looks OK for now. . Date: 11/16/2004 Tube Name/Number Status Comments THICKNESS-Change at Tylan 1 Up Tylan 2 Up Tylan 3 Up Tylan 4 Up Tylan 5-BBr3 Up Tylan 6-POCl3 Up Tylan 7-TEOS2 down Qual testing Tylan 8-SiGe Up 12.88/30 Tylan 9-Poly yellow observation 19.44/30 Tylan 10-Nitride Up 18.9.8/30 Tylan 11-BPSG-LTO Up 20.7/30 Tylan 12-FGA Up Tystar Up 17.07/30 Doped Poly GONE TEOS up Tylan 16 N/A Thermco 1 Up Thermco 2 Up Thermco Poly yellow Testing Thermco Nitride Down Waiting Burn Box Up ZYGO up GAAS 22 UP GAAS 23 UP SiH4 for furnaces Auto changeover working well B on line 280 PSI -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at snf.stanford.edu Wed Nov 17 06:41:33 2004 From: tberg at snf.stanford.edu (Ted Berg) Date: Wed, 17 Nov 2004 06:41:33 -0800 Subject: Diffusion Morning Report 11/16/04 Message-ID: <419B631D.7010404@snf.stanford.edu> Good Morning all, Looking OK this morning. LTO is down for high base pressure-looking into it. Nitride and POly still under observation. TEOS2 cannister changed yesterday. Thermco Poly testing. Everything else looks OK for now. . Date: 11/17/2004 Tube Name/Number Status Comments THICKNESS-Change at Tylan 1 Up Tylan 2 Up Tylan 3 Up Tylan 4 Up Tylan 5-BBr3 Up Tylan 6-POCl3 Up Tylan 7-TEOS2 down Qual testing Tylan 8-SiGe Up 12.88/30 Tylan 9-Poly yellow observation 19.67/30 Tylan 10-Nitride Up 20.4/30 Tylan 11-BPSG-LTO Up 20.7/30 Tylan 12-FGA Up Tystar Up 17.07/30 Doped Poly GONE TEOS up Tylan 16 N/A Thermco 1 Up Thermco 2 Up Thermco Poly yellow Testing Thermco Nitride Down Waiting Burn Box Up ZYGO up GAAS 22 UP GAAS 23 UP SiH4 for furnaces Auto changeover working well B on line 260 PSI -------------- next part -------------- An HTML attachment was scrubbed... URL: From nanotech at nsti.org Wed Nov 17 18:37:47 2004 From: nanotech at nsti.org (Nanotech 2005) Date: Wed, 17 Nov 2004 18:37:47 -0800 Subject: Friday Abstract Deadline - Nanotech 2005 Message-ID: Nanotech 2005 The Nanotechnology Conference and Trade Show Anaheim Conference Center, May 8-12 2005 http://www.nanotech2005.com ABSTRACT DEADLINE, THIS FRIDAY, Nov. 19th - 423 abstracts already submitted - SUBMIT YOUR ABSTRACT TODAY http://www.nsti.org/Nanotech2005/authors Inter-Disciplinary, Multi-Industry, Technology to Business: - 2500+ Attendees - 600+ Research, business, investment presentations - 130+ Exhibiting companies and demos - 50+ Early stage nanotech companies, Investment forum Industrial Participants Include: GE, IBM, Intel, Hewlett-Packard, Honeywell, Freescale Motorola, ST Microelectronics, Molecular Diamond Technologies, Proctor & Gamble, Nestl?, Chiron, Ciphergen Biosystems, ChevronTexaco, DuPont, Daimler-Chrysler, Kodak, Samsung, Boeing Accelrys, Nanophase, NanoInk, Molecular Imprints, Synopsys Veeco, Zygo, Keithley, Heidelberg, Carl Zeiss, ... (many more) EXHIBIT & SPONSOR TODAY - space is rapidly filling http://www.nsti.org/Nanotech2005/exhibit_sponsor.html SUBMIT YOUR ABSTRACT TODAY http://www.nsti.org/Nanotech2005/authors - text announce x3427 - --- You are currently subscribed to nanotech as: diffusion at snf.stanford.edu To unsubscribe send a blank email to leave-nanotech-6199311S at spirit.sparklist.com From tberg at snf.stanford.edu Thu Nov 18 06:27:15 2004 From: tberg at snf.stanford.edu (Ted Berg) Date: Thu, 18 Nov 2004 06:27:15 -0800 Subject: Diffusion Morning Report 11/18/04 Message-ID: <419CB143.2010700@snf.stanford.edu> Good Morning All, Looking good this morning. LTO is humming along after pump change. IT is at 24 microns and will need to go down next week for pull and clean. Thermco burn box element is bad new one should be here tomorrow. Tylan nitride and poly under observation. Everything else looks OK for now . Date: 11/18/2004 Tube Name/Number Status Comments THICKNESS-Change at Tylan 1 Up Tylan 2 Up Tylan 3 Up Tylan 4 Up Tylan 5-BBr3 Up Tylan 6-POCl3 Up Tylan 7-TEOS2 down Qual testing Tylan 8-SiGe Up 12.88/30 Tylan 9-Poly yellow observation 19.67/30 Tylan 10-Nitride Up 20.4/30 Tylan 11-BPSG-LTO Up 24.6/30 Tylan 12-FGA Up Tystar Up 17.07/30 Doped Poly GONE TEOS up Tylan 16 N/A Thermco 1 Up Thermco 2 Up Thermco Poly down burn box element bad Thermco Nitride Down Waiting Burn Box Up ZYGO up GAAS 22 UP GAAS 23 UP SiH4 for furnaces Auto changeover working well B on line 250 PSI -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at snf.stanford.edu Fri Nov 19 06:36:28 2004 From: tberg at snf.stanford.edu (Ted Berg) Date: Fri, 19 Nov 2004 06:36:28 -0800 Subject: Diffusion Morning Report 11/19/04 Message-ID: <419E04EC.60703@snf.stanford.edu> Good Morning All, Looking pretty good this morning. Burn box cleaned this morning. LTO going down Monday morning for pull and clean, it is already at 33 microns. Poly added 6 microns yesterday so it will probably go down next week also. TEOS2 is testing, Thermco burn box is waiting for an element.. Everything else looks ok for now. . Date: 11/19/2004 Tube Name/Number Status Comments THICKNESS-Change at Tylan 1 Up Tylan 2 Up Tylan 3 Up Tylan 4 Up Tylan 5-BBr3 Up Tylan 6-POCl3 Up Tylan 7-TEOS2 down Qual testing Tylan 8-SiGe Up 12.88/30 Tylan 9-Poly yellow observation 25.27/30 Tylan 10-Nitride Up 21.4/30 Tylan 11-BPSG-LTO Up 33.16/30 Tylan 12-FGA Up Tystar Up 18.76/30 Doped Poly GONE TEOS up Tylan 16 N/A Thermco 1 Up Thermco 2 Up Thermco Poly down burn box element bad Thermco Nitride Down Waiting Burn Box Up cleaned this morning ZYGO up GAAS 22 UP GAAS 23 UP SiH4 for furnaces Auto changeover working well B on line 200 PSI -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at snf.stanford.edu Mon Nov 22 06:31:42 2004 From: tberg at snf.stanford.edu (Ted Berg) Date: Mon, 22 Nov 2004 06:31:42 -0800 Subject: Diffusion Morning Report 11/22/04 Message-ID: <41A1F84E.8040801@snf.stanford.edu> Good Morning All, Looking Good this morning . LTO is down for scheduled pull and clean. Nitride and poly are under observation. THermco burn box element replaced last week. Everything else looks OK for now . Hitachi FS is here today to address some lingering issues. . Date: 11/22/2004 Tube Name/Number Status Comments THICKNESS-Change at Tylan 1 Up Tylan 2 Up Tylan 3 Up Tylan 4 Up Tylan 5-BBr3 Up Tylan 6-POCl3 Up Tylan 7-TEOS2 down Qual testing Tylan 8-SiGe Up 12.88/30 Tylan 9-Poly yellow observation 26.51/30 Tylan 10-Nitride Up 26.8/30 Tylan 11-BPSG-LTO down scheduled pull and clean 0/30 Tylan 12-FGA Up Tystar Up 18.7/30 Doped Poly GONE TEOS up Tylan 16 N/A Thermco 1 Up Thermco 2 Up Thermco Poly yellow testing Thermco Nitride Down Waiting Burn Box Up ZYGO up GAAS 22 UP GAAS 23 UP SiH4 for furnaces Auto changeover working well B on line 160 PSI -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at snf.stanford.edu Tue Nov 23 06:42:09 2004 From: tberg at snf.stanford.edu (Ted Berg) Date: Tue, 23 Nov 2004 06:42:09 -0800 Subject: Diffusion Morning Report 11/23/04 Message-ID: <41A34C41.9040509@snf.stanford.edu> Good Morning All, Looking Good this morning. Great job by Mike D and process on tube change yesterday. Nitride and Poly are at 25+ microns so they will be going down soon after the Holiday. Burn box being cleaned today in prep for Holiday. Please use chemicals judiciously over the holiday so others can continue to process. TEOS2 and Thermco Poly testing. Everything else looks ok for now. I will be taking tomorrow off to get a jump on the Hoiliday so everyone have a great Hoiliday. . Date: 11/23/2004 Tube Name/Number Status Comments THICKNESS-Change at Tylan 1 Up Tylan 2 Up Tylan 3 Up Tylan 4 Up Tylan 5-BBr3 Up Tylan 6-POCl3 Up Tylan 7-TEOS2 down Qual testing Tylan 8-SiGe Up 12.88/30 Tylan 9-Poly yellow observation 26.51/30 Tylan 10-Nitride Up 26.8/30 Tylan 11-BPSG-LTO Up .41/30 Tylan 12-FGA Up Tystar Up 18.7/30 Doped Poly GONE TEOS up Tylan 16 N/A Thermco 1 Up Thermco 2 Up Thermco Poly yellow testing Thermco Nitride Down Waiting Burn Box Up Cleaned this morning ZYGO up GAAS 22 UP GAAS 23 UP SiH4 for furnaces Auto changeover working well B on line 160 PSI -------------- next part -------------- An HTML attachment was scrubbed... URL: From nanotech at nsti.org Wed Nov 24 04:10:00 2004 From: nanotech at nsti.org (Nano Science and Technology Institute) Date: Wed, 24 Nov 2004 04:10:00 -0800 Subject: Nanotech Courses - Davos Switzerland - Announcement Message-ID: An HTML attachment was scrubbed... URL: From seymour at snf.stanford.edu Wed Nov 24 08:50:41 2004 From: seymour at snf.stanford.edu (Ray Seymour) Date: Wed, 24 Nov 2004 08:50:41 -0800 Subject: Diffusion Morning Report Message-ID: <41A4BBE1.B31E991D@snf.stanford.edu> Morning All, The greeting should have said, Morning Few, as it is a little lonely around here this morning. The big issue this morning is the BPSG with flakes on all wafers. Clean dummies have been loaded but no further tube process has been done. I, with Mike will open the tube and check out the situation. All else looking pretty good. Poly will be going down for a pull and clean on Monday morning. Also the burnbox will need to be cleaned Monday morning after the long weekend. Date: 11/24/2004 Tube Name/Number Status Comments THICKNESS-Change at Tylan 1 Up Tylan 2 Up Tylan 3 Up Tylan 4 Up Tylan 5-BBr3 Up Tylan 6-POCl3 Up Tylan 7-TEOS2 down Qual testing Tylan 8-SiGe Up 12.33/30 Tylan 9-Poly Yellow Observation 32.67/30 Tylan 10-Nitride Up 27/30 Tylan 11-BPSG-LTO Down Flakes on wafers 3.41/30 Tylan 12-FGA Up Tystar Up 19.32/30 Doped Poly GONE TEOS yellow Tylan 16 N/A Yhermco 1 UP Thermco 1 UP Thermco Poly Yellow Testing Thermco Nitride Down Waiting Burn Box Up ZYGO Up GAAS 22 UP GAAS 23 UP SiH4 for furnaces Auto changeover working well B on line 160 PSI -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at snf.stanford.edu Mon Nov 29 06:42:24 2004 From: tberg at snf.stanford.edu (Ted Berg) Date: Mon, 29 Nov 2004 06:42:24 -0800 Subject: Diffusion Morning Report 11/29/04 Message-ID: <41AB3550.7040103@snf.stanford.edu> Good Morning All, Welcome back. Looking OK this morning Poly is at 33+ microns and will go down for pull and clean as soon as current run is finished. Burn box is way positive and will go down for clean as soon as poly run is finished. Nitride is at 32+ and will go down tomorrow for pull and clean. TEOS2 and Thermco poly testing. Everything else looks ok for now. . Date: 11/29/2004 Tube Name/Number Status Comments THICKNESS-Change at Tylan 1 Up Tylan 2 Up Tylan 3 Up Tylan 4 Up Tylan 5-BBr3 Up Tylan 6-POCl3 Up Tylan 7-TEOS2 down Qual testing Tylan 8-SiGe Up 12.88/30 Tylan 9-Poly down pull and clean 0/30 Tylan 10-Nitride Up 31.06/30 Tylan 11-BPSG-LTO Up 12.8/30 Tylan 12-FGA Up Tystar Up 19.32/30 Doped Poly GONE TEOS up Tylan 16 N/A Thermco 1 Up Thermco 2 Up Thermco Poly yellow testing Thermco Nitride Down Waiting Burn Box Up VERY Positive-clean? ZYGO up GAAS 22 UP GAAS 23 UP SiH4 for furnaces Auto changeover working well A on line 640 PSI -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at snf.stanford.edu Tue Nov 30 06:26:17 2004 From: tberg at snf.stanford.edu (Ted Berg) Date: Tue, 30 Nov 2004 06:26:17 -0800 Subject: Diffusion Morning report 11/30/04 Message-ID: <41AC8309.6070503@snf.stanford.edu> Good Morning All, Looking OK this morning . Poly and nitride down for tube change. Epi is down for HCl cylinder change. TEOS2 and Thermco poly testing. Everything else looks ok for now. . Date: 11/30/2004 Tube Name/Number Status Comments THICKNESS-Change at Tylan 1 Up Tylan 2 Up Tylan 3 Up Tylan 4 Up Tylan 5-BBr3 Up Tylan 6-POCl3 Up Tylan 7-TEOS2 down Qual testing Tylan 8-SiGe Up 12.88/30 Tylan 9-Poly down pull and clean 0/30 Tylan 10-Nitride down pull and clean 0/30 Tylan 11-BPSG-LTO Up 16.29/30 Tylan 12-FGA Up Tystar Up 19.36/30 Doped Poly GONE TEOS up Tylan 16 N/A Thermco 1 Up Thermco 2 Up Thermco Poly yellow testing Thermco Nitride Down Waiting Burn Box Up ZYGO up GAAS 22 UP GAAS 23 UP SiH4 for furnaces Auto changeover working well A on line 630 PSI -------------- next part -------------- An HTML attachment was scrubbed... URL: