Diffusion Morning Report 11/01/04

Ted Berg tberg at snf.stanford.edu
Mon Nov 1 06:35:07 PST 2004


Good Morning All,
    Looking pretty good this morning.  Tylan 2 had a temp issue -looking 
into it.  Nitride and Poly still under observation.  TEOS2 and Thermco Poly
are testing.   Everything else looks ok for now.

. 	Date: 	11/1/2004 	 
Tube Name/Number 	Status 	Comments 	THICKNESS-Change at
Tylan 1 	Up 	  	 
Tylan 2 	yellow 	Load temp problem 	 
Tylan 3 	Up 	  	 
Tylan 4 	Up 	  	 
Tylan 5-BBr3 	Up 	  	 
Tylan 6-POCl3 	Up 	  	 
Tylan 7-TEOS2 	down 	Qual testing 	 
Tylan 8-SiGe 	Up 	  	12.33/30
Tylan 9-Poly 	yellow 	observation 	17.8/30
Tylan 10-Nitride 	yellow 	observation 	7.36/30
Tylan 11-BPSG-LTO 	Up 	  	1.16/30
Tylan 12-FGA 	Up 	  	 
Tystar 	Up 	  	11.2/30
Doped Poly 	GONE 	  	 
TEOS 	up 	  	 
Tylan 16 	N/A 	  	 
Thermco 1 	Up 	  	 
Thermco 2 	Up 	  	 
Thermco Poly 	yellow 	Testing 	 
Thermco Nitride 	Down 	Waiting 	 
  	  	  	 
Burn Box 	Up 	  	 
ZYGO 	up 	  	 
  	  	  	 
GAAS 22 	UP 	  	 
GAAS 23 	UP 	  	 
  	  	  	 
SiH4 for furnaces 	  	Auto changeover working well 	B on line 440 PSI
  	  	  	 


   
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