Diffusion Morning Report 11/04/04

Ted Berg tberg at snf.stanford.edu
Thu Nov 4 06:45:07 PST 2004


Good Morning All,
    Looking OK this morning.  Poly still under observation. Nitride pump 
was off this morning-looking into it.  TEOS2 and Thermco poly
testing.  Everything else looks OK for now.

. 	Date: 	11/4/2004 	 
Tube Name/Number 	Status 	Comments 	THICKNESS-Change at
Tylan 1 	Up 	  	 
Tylan 2 	Up 	  	 
Tylan 3 	Up 	  	 
Tylan 4 	Up 	  	 
Tylan 5-BBr3 	Up 	  	 
Tylan 6-POCl3 	Up 	  	 
Tylan 7-TEOS2 	down 	Qual testing 	 
Tylan 8-SiGe 	Up 	  	12.33/30
Tylan 9-Poly 	yellow 	observation 	18.0/30
Tylan 10-Nitride 	yellow 	observation-pump off 	10.49/30
Tylan 11-BPSG-LTO 	Up 	  	4.05/30
Tylan 12-FGA 	Up 	  	 
Tystar 	Up 	  	11.2/30
Doped Poly 	GONE 	  	 
TEOS 	up 	  	 
Tylan 16 	N/A 	  	 
Thermco 1 	Up 	  	 
Thermco 2 	Up 	  	 
Thermco Poly 	yellow 	Testing 	 
Thermco Nitride 	Down 	Waiting 	 
  	  	  	 
Burn Box 	Up 	  	 
ZYGO 	up 	  	 
  	  	  	 
GAAS 22 	UP 	  	 
GAAS 23 	UP 	  	 
  	  	  	 
SiH4 for furnaces 	  	Auto changeover working well 	B on line 380 PSI


-------------- next part --------------
An HTML attachment was scrubbed...
URL: <http://snf.stanford.edu/pipermail/diffusion/attachments/20041104/c603564f/attachment.html>


More information about the diffusion mailing list