Diffusion Morning Report

Ray Seymour seymour at snf.stanford.edu
Fri Nov 5 08:11:47 PST 2004


Morning all,
Ted is out today. Diffusion is looking good this morning. Nitride pump
change went well, and tube is under observation for particles as before.
Poly is under observation also. The rest are running fine. Have a great
weekend.




Diffusion                    Date:                  11/52004
Tube Name/Number Status
Comments                                              THICKNESS-Change
at
Tylan 1                      Up
Tylan 2                      Up
Tylan 3                      Up
Tylan 4                      Up
Tylan 5-BBr3            Up
Tylan 6-POCl3          Up
Tylan 7-TEOS2         down                    Qual testing
Tylan 8-SiGe
Up
12.33/30
Tylan 9-Poly              Yellow
observation                                            18/30
Tylan 10-Nitride        Yellow
observation                                            10.99/30
Tylan 11-BPSG-LTO
Up
4.55/30
Tylan 12-FGA            Up
Tystar
Up
14.2/30
Doped Poly                GONE
TEOS                        Yellow
Tylan 16 N/A
Yhermco 1                  UP
Thermco 1                  UP
Thermco Poly             Yellow                   Testing
Thermco Nitride          Down                    Waiting

Burn Box Up                                             Cleaned this
morning

ZYGO Up

GAAS 22 UP
GAAS 23 UP

SiH4 for furnaces                         Auto changeover working
well           B on line 360 PSI

























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