Diffusion Morning Report 11/11/04

Ted Berg tberg at snf.stanford.edu
Thu Nov 11 07:17:04 PST 2004


Good Morning All,
    Looking pretty good this morning. Had a power glitch last night some 
tools effected. NH3 for Nitride was off -back on now. Poly
is under observation. TEOS2 and Thermco poly testing.  Everything else 
looks OK for now.

. 	Date: 	11/10/2004 	 
Tube Name/Number 	Status 	Comments 	THICKNESS-Change at
Tylan 1 	Up 	  	 
Tylan 2 	Up 	  	 
Tylan 3 	Up 	  	 
Tylan 4 	Up 	  	 
Tylan 5-BBr3 	Up 	  	 
Tylan 6-POCl3 	Up 	  	 
Tylan 7-TEOS2 	down 	Qual testing 	 
Tylan 8-SiGe 	Up 	  	12.88/30
Tylan 9-Poly 	yellow 	observation 	19.3/30
Tylan 10-Nitride 	Up 	 NH3 Problem after power glitch 	13.66/30
Tylan 11-BPSG-LTO 	Up 	  	8.62/30
Tylan 12-FGA 	Up 	  	 
Tystar 	Up 	  	16.3/30
Doped Poly 	GONE 	  	 
TEOS 	up 	  	 
Tylan 16 	N/A 	  	 
Thermco 1 	Up 	  	 
Thermco 2 	Up 	  	 
Thermco Poly 	yellow 	Testing 	 
Thermco Nitride 	Down 	Waiting 	 
  	  	  	 
Burn Box 	Up 	  	 
ZYGO 	up 	  	 
  	  	  	 
GAAS 22 	UP 	  	 
GAAS 23 	UP 	  	 
  	  	  	 
SiH4 for furnaces 	  	Auto changeover working well 	B on line 320 PSI


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