Diffusion Morning Report 11/15/04

Ted Berg tberg at snf.stanford.edu
Mon Nov 15 07:04:34 PST 2004


Good Morning All,
    Looking pretty good this morning. Tylan Nitride and Poly still under 
observation.  TEOS2 and Thermco Poly testing.  Evberything else
looks OK for now.

. 	Date: 	11/15/2004 	 
Tube Name/Number 	Status 	Comments 	THICKNESS-Change at
Tylan 1 	Up 	  	 
Tylan 2 	Up 	  	 
Tylan 3 	Up 	  	 
Tylan 4 	Up 	  	 
Tylan 5-BBr3 	Up 	  	 
Tylan 6-POCl3 	Up 	  	 
Tylan 7-TEOS2 	down 	Qual testing 	 
Tylan 8-SiGe 	Up 	  	12.88/30
Tylan 9-Poly 	yellow 	observation 	19.44/30
Tylan 10-Nitride 	Up 	  	17.14/30
Tylan 11-BPSG-LTO 	Up 	  	16.3/30
Tylan 12-FGA 	Up 	  	 
Tystar 	Up 	  	16.3/30
Doped Poly 	GONE 	  	 
TEOS 	up 	  	 
Tylan 16 	N/A 	  	 
Thermco 1 	Up 	  	 
Thermco 2 	Up 	  	 
Thermco Poly 	yellow 	Testing 	 
Thermco Nitride 	Down 	Waiting 	 
  	  	  	 
Burn Box 	Up 	  	 
ZYGO 	up 	  	 
  	  	  	 
GAAS 22 	UP 	  	 
GAAS 23 	UP 	  	 
  	  	  	 
SiH4 for furnaces 	  	Auto changeover working well 	B on line 310 PSI




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