Diffusion Morning Report 11/18/04

Ted Berg tberg at snf.stanford.edu
Thu Nov 18 06:27:15 PST 2004

Good Morning All,
    Looking  good this morning.  LTO is humming along after pump change. 
IT is at 24 microns and will need to go down next week for pull and
clean.  Thermco burn box element is bad new one should be here 
tomorrow.  Tylan nitride and poly under observation.  Everything else 
looks OK for now

. 	Date: 	11/18/2004 	 
Tube Name/Number 	Status 	Comments 	THICKNESS-Change at
Tylan 1 	Up 	  	 
Tylan 2 	Up 	  	 
Tylan 3 	Up 	  	 
Tylan 4 	Up 	  	 
Tylan 5-BBr3 	Up 	  	 
Tylan 6-POCl3 	Up 	  	 
Tylan 7-TEOS2 	down 	Qual testing 	 
Tylan 8-SiGe 	Up 	  	12.88/30
Tylan 9-Poly 	yellow 	observation 	19.67/30
Tylan 10-Nitride 	Up 	  	20.4/30
Tylan 11-BPSG-LTO 	Up 	  	24.6/30
Tylan 12-FGA 	Up 	  	 
Tystar 	Up 	  	17.07/30
Doped Poly 	GONE 	  	 
TEOS 	up 	  	 
Tylan 16 	N/A 	  	 
Thermco 1 	Up 	  	 
Thermco 2 	Up 	  	 
Thermco Poly 	down 	 burn box element bad 	 
Thermco Nitride 	Down 	Waiting 	 
Burn Box 	Up 	  	 
ZYGO 	up 	  	 
GAAS 22 	UP 	  	 
GAAS 23 	UP 	  	 
SiH4 for furnaces 	  	Auto changeover working well 	B on line 250 PSI

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