Diffusion Morning Report 11/19/04

Ted Berg tberg at snf.stanford.edu
Fri Nov 19 06:36:28 PST 2004

Good Morning All,
    Looking pretty good this morning.  Burn box cleaned this morning.  
LTO going down Monday morning for pull and clean, it is already at 33
microns.  Poly added 6 microns yesterday so it will probably go down 
next week also.  TEOS2 is testing, Thermco burn box is waiting for an 
Everything else looks ok for now.

. 	Date: 	11/19/2004 	 
Tube Name/Number 	Status 	Comments 	THICKNESS-Change at
Tylan 1 	Up 	  	 
Tylan 2 	Up 	  	 
Tylan 3 	Up 	  	 
Tylan 4 	Up 	  	 
Tylan 5-BBr3 	Up 	  	 
Tylan 6-POCl3 	Up 	  	 
Tylan 7-TEOS2 	down 	Qual testing 	 
Tylan 8-SiGe 	Up 	  	12.88/30
Tylan 9-Poly 	yellow 	observation 	25.27/30
Tylan 10-Nitride 	Up 	  	21.4/30
Tylan 11-BPSG-LTO 	Up 	  	33.16/30
Tylan 12-FGA 	Up 	  	 
Tystar 	Up 	  	18.76/30
Doped Poly 	GONE 	  	 
TEOS 	up 	  	 
Tylan 16 	N/A 	  	 
Thermco 1 	Up 	  	 
Thermco 2 	Up 	  	 
Thermco Poly 	down 	 burn box element bad 	 
Thermco Nitride 	Down 	Waiting 	 
Burn Box 	Up 	cleaned this morning 	 
ZYGO 	up 	  	 
GAAS 22 	UP 	  	 
GAAS 23 	UP 	  	 
SiH4 for furnaces 	  	Auto changeover working well 	B on line 200 PSI

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