Diffusion Morning Report 11/22/04

Ted Berg tberg at snf.stanford.edu
Mon Nov 22 06:31:42 PST 2004

Good Morning All,
    Looking Good this morning .  LTO is down for scheduled pull and 
clean.  Nitride and poly are under observation.  THermco burn box
element replaced last week.  Everything else looks OK for now .  Hitachi 
FS is here today to address some lingering issues.

. 	Date: 	11/22/2004 	 
Tube Name/Number 	Status 	Comments 	THICKNESS-Change at
Tylan 1 	Up 	  	 
Tylan 2 	Up 	  	 
Tylan 3 	Up 	  	 
Tylan 4 	Up 	  	 
Tylan 5-BBr3 	Up 	  	 
Tylan 6-POCl3 	Up 	  	 
Tylan 7-TEOS2 	down 	Qual testing 	 
Tylan 8-SiGe 	Up 	  	12.88/30
Tylan 9-Poly 	yellow 	observation 	26.51/30
Tylan 10-Nitride 	Up 	  	26.8/30
Tylan 11-BPSG-LTO 	down 	scheduled pull and clean 	0/30
Tylan 12-FGA 	Up 	  	 
Tystar 	Up 	  	18.7/30
Doped Poly 	GONE 	  	 
TEOS 	up 	  	 
Tylan 16 	N/A 	  	 
Thermco 1 	Up 	  	 
Thermco 2 	Up 	  	 
Thermco Poly 	yellow 	testing 	 
Thermco Nitride 	Down 	Waiting 	 
Burn Box 	Up 	  	 
ZYGO 	up 	  	 
GAAS 22 	UP 	  	 
GAAS 23 	UP 	  	 
SiH4 for furnaces 	  	Auto changeover working well 	B on line 160 PSI

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