Diffusion Morning Report 11/23/04

Ted Berg tberg at snf.stanford.edu
Tue Nov 23 06:42:09 PST 2004

Good Morning All,
    Looking Good this morning.  Great job by Mike D and process on tube 
change yesterday. Nitride and Poly are at 25+ microns so
they will be going down soon after the Holiday.  Burn box being cleaned 
today in prep for Holiday.  Please use chemicals judiciously
over the holiday so others can continue to process.   TEOS2 and Thermco 
Poly testing.  Everything else looks ok for now.  I will be taking tomorrow
off to get a jump on the Hoiliday so everyone have a great Hoiliday. 

. 	Date: 	11/23/2004 	 
Tube Name/Number 	Status 	Comments 	THICKNESS-Change at
Tylan 1 	Up 	  	 
Tylan 2 	Up 	  	 
Tylan 3 	Up 	  	 
Tylan 4 	Up 	  	 
Tylan 5-BBr3 	Up 	  	 
Tylan 6-POCl3 	Up 	  	 
Tylan 7-TEOS2 	down 	Qual testing 	 
Tylan 8-SiGe 	Up 	  	12.88/30
Tylan 9-Poly 	yellow 	observation 	26.51/30
Tylan 10-Nitride 	Up 	  	26.8/30
Tylan 11-BPSG-LTO 	Up 	  	.41/30
Tylan 12-FGA 	Up 	  	 
Tystar 	Up 	  	18.7/30
Doped Poly 	GONE 	  	 
TEOS 	up 	  	 
Tylan 16 	N/A 	  	 
Thermco 1 	Up 	  	 
Thermco 2 	Up 	  	 
Thermco Poly 	yellow 	testing 	 
Thermco Nitride 	Down 	Waiting 	 
Burn Box 	Up 	 Cleaned this morning
ZYGO 	up 	  	 
GAAS 22 	UP 	  	 
GAAS 23 	UP 	  	 
SiH4 for furnaces 	  	Auto changeover working well 	B on line 160 PSI

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