Diffusion Morning Report 11/29/04

Ted Berg tberg at snf.stanford.edu
Mon Nov 29 06:42:24 PST 2004


Good Morning All,
    Welcome back.  Looking OK this morning  Poly is at 33+ microns and 
will go down for pull and clean as soon as current run is finished.
Burn box is way positive and will go down for clean as soon as poly run 
is finished.  Nitride is at 32+ and will go down tomorrow for pull and 
clean.
TEOS2 and Thermco poly testing.  Everything else looks ok for now.

. 	Date: 	11/29/2004 	 
Tube Name/Number 	Status 	Comments 	THICKNESS-Change at
Tylan 1 	Up 	  	 
Tylan 2 	Up 	  	 
Tylan 3 	Up 	  	 
Tylan 4 	Up 	  	 
Tylan 5-BBr3 	Up 	  	 
Tylan 6-POCl3 	Up 	  	 
Tylan 7-TEOS2 	down 	Qual testing 	 
Tylan 8-SiGe 	Up 	  	12.88/30
Tylan 9-Poly 	down 	pull and clean 	0/30
Tylan 10-Nitride 	Up 	  	31.06/30
Tylan 11-BPSG-LTO 	Up 	  	12.8/30
Tylan 12-FGA 	Up 	  	 
Tystar 	Up 	  	19.32/30
Doped Poly 	GONE 	  	 
TEOS 	up 	  	 
Tylan 16 	N/A 	  	 
Thermco 1 	Up 	  	 
Thermco 2 	Up 	  	 
Thermco Poly 	yellow 	testing 	 
Thermco Nitride 	Down 	Waiting 	 
  	  	  	 
Burn Box 	Up 	VERY Positive-clean? 	 
ZYGO 	up 	  	 
  	  	  	 
GAAS 22 	UP 	  	 
GAAS 23 	UP 	  	 
  	  	  	 
SiH4 for furnaces 	  	Auto changeover working well 	A on line 640 PSI


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