Diffusion Morning Report 10/06/04

tberg tberg at snf.stanford.edu
Wed Oct 6 06:27:00 PDT 2004


Good Morning All,
    Looking good this morning . Poly is back to gren after a month of 
observation. Nitride is still under observation.  Epi is wonderful
again.  Everything else looking good for now.  WBsilicide will most 
likely be moving next week so be prepared.

Diffusion 	Date: 	10/6/2004 	 
Tube Name/Number 	Status 	Comments 	THICKNESS-Change at
Tylan 1 	Up 	  	 
Tylan 2 	Up 	  	 
Tylan 3 	Up 	  	 
Tylan 4 	Up 	  	 
Tylan 5-BBr3 	Up 	  	 
Tylan 6-POCl3 	Up 	  	 
Tylan 7-TEOS2 	down 	Qual testing-changed TEOS Container 	 
Tylan 8-SiGe 	Up 	  	12.33/30
Tylan 9-Poly 	Up 	  	17.27/30
Tylan 10-Nitride 	yellow 	possible particle issues 	1.06/30
Tylan 11-BPSG-LTO 	Up 	  	14.58/30
Tylan 12-FGA 	Up 	  	 
Tystar 	Up 	  	4.33/30
Doped Poly 	GONE 	  	 
TEOS 	up 	  	 
Tylan 16 	N/A 	  	 
Thermco 1 	Up 	  	 
Thermco 2 	Up 	  	 
Thermco Poly 	yellow 	Testing 	 
Thermco Nitride 	Down 	Waiting 	 
  	  	  	 
Burn Box 	Up 	  	 
ZYGO 	up 	  	 
  	  	  	 
GAAS 22 	UP 	  	 
GAAS 23 	UP 	  	 
  	  	  	 
SiH4 for furnaces 	  	Auto changeover working well 	B on line 560 PSI


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