Diffusion Morning Report 10/14/04

tberg tberg at snf.stanford.edu
Thu Oct 14 06:22:53 PDT 2004

Good Morning All,
    Looking pretty good this morning.  Poly and Nitride under 
observation.  Epi waiting parts.  TEOS2 and Thermco poly testing.
Everything else looks ok for now.

. 	Date: 	10/14/2004 	 
Tube Name/Number 	Status 	Comments 	THICKNESS-Change at
Tylan 1 	Up 	  	 
Tylan 2 	Up
	Possible uniformity problems _injector replaced
Tylan 3 	Up 	  	 
Tylan 4 	Up 	  	 
Tylan 5-BBr3 	Up 	  	 
Tylan 6-POCl3 	Up 	  	 
Tylan 7-TEOS2 	down 	Qual testing-changed TEOS Container 	 
Tylan 8-SiGe 	Up 	  	12.33/30
Tylan 9-Poly 	yellow 	observation 	8.15//30
Tylan 10-Nitride 	yellow 	possible particle issues 	1.78/30
Tylan 11-BPSG-LTO 	Up 	  	19.29/30
Tylan 12-FGA 	Up 	  	 
Tystar 	Up 	  	4.33/30
Doped Poly 	GONE 	  	 
TEOS 	up 	  	 
Tylan 16 	N/A 	  	 
Thermco 1 	Up 	  	 
Thermco 2 	Up 	  	 
Thermco Poly 	yellow 	Testing 	 
Thermco Nitride 	Down 	Waiting 	 
Burn Box 	Up 	  	 
ZYGO 	up 	  	 
GAAS 22 	UP 	  	 
GAAS 23 	UP 	  	 
SiH4 for furnaces 	  	Auto changeover working well 	B on line 555 PSI

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