From seymour at snf.stanford.edu Wed Sep 1 09:10:11 2004 From: seymour at snf.stanford.edu (Ray Seymour) Date: Wed, 01 Sep 2004 09:10:11 -0700 Subject: Diffusion Morning Report Message-ID: <4135F462.E340C7E8@snf.stanford.edu> Good Morning All, I was held up this morning with a Dr. appointment. Nitride has a problem with leak check failing. If Poly has completed the temp. cal will do a coat/test. Everything else looks pretty good. Diffusion Date: 9/1/2004 Tube Name/Number Status Comments THICKNESS-Change at Tylan 1 Up Tylan 2 Up Tylan 3 Up Tylan 4 Up Tylan 5-BBr3 Up Tylan 6-POCl3 Up Tylan 7-TEOS2 Down Qual testing-reoreinted MFC Tylan 8-SiGe Up 11.99/30 Tylan 9-Poly Down Duing temp cal 5.57/30 Tylan 10-Nitride Down Failing leak check 10.915/30 Tylan 11-BPSG-LTO Up 3.07/30 Tylan 12-FGA Up Tystar Up 27.11/30 Doped Poly GONE TEOS Up Tylan 16 N/A Burn Box Up ZYGO Up GAAS 22 UP GAAS 23 UP SiH4 for furnaces Auto changeover working well B on line 690 PSI -------------- next part -------------- An HTML attachment was scrubbed... URL: From seymour at snf.stanford.edu Thu Sep 2 08:48:59 2004 From: seymour at snf.stanford.edu (Ray Seymour) Date: Thu, 02 Sep 2004 08:48:59 -0700 Subject: Diffusion Morning Report Message-ID: <413740EB.4209DB59@snf.stanford.edu> Good Morning All, The coat on poly looked good yesterday afternoon. The test results should be in soon. Nitride has had pumpdown problems. The loader was rebuilt yesterday afternoon. Mike found the pump off this morning. The tube is still down for a test. All else is good. Diffusion Date: 9/2/2004 Tube Name/Number Status Comments THICKNESS-Change at Tylan 1 Up Tylan 2 Up Tylan 3 Up Tylan 4 Up Tylan 5-BBr3 Up Tylan 6-POCl3 Up Tylan 7-TEOS2 Down Qual testing-reoreinted MFC Tylan 8-SiGe Up 11.99/30 Tylan 9-Poly Down Waiting for test results coat looked goodl 0/30 Tylan 10-Nitride Down Failing leak check 11.8/30 Tylan 11-BPSG-LTO Up 3.07/30 Tylan 12-FGA Up Tystar Up 27.11/30 Doped Poly GONE TEOS Up Tylan 16 N/A Burn Box Up ZYGO Up GAAS 22 UP GAAS 23 UP SiH4 for furnaces Auto changeover working well B on line 680 PSI -------------- next part -------------- An HTML attachment was scrubbed... URL: From up at northbank03.com Thu Sep 2 12:28:01 2004 From: up at northbank03.com (University of Phoenix) Date: Thu, 2 Sep 2004 14:28:01 -0500 Subject: Looking for an edge Message-ID: <1094149681.8102@host70.northbank03.com> An HTML attachment was scrubbed... URL: From seymour at snf.stanford.edu Fri Sep 3 08:46:38 2004 From: seymour at snf.stanford.edu (Ray Seymour) Date: Fri, 03 Sep 2004 08:46:38 -0700 Subject: Diffusion Morning Report Message-ID: <413891DE.FC8FE757@snf.stanford.edu> Good Morning All, Looking better today. Poly is up on yellow for observation after failure last week. Nitride is up along with all else. Have a great Labor Day Holiday. Diffusion Date: 9/3/2004 Tube Name/Number Status Comments THICKNESS-Change at Tylan 1 Up Tylan 2 Up Tylan 3 Up Tylan 4 Up Tylan 5-BBr3 Up Tylan 6-POCl3 Up Tylan 7-TEOS2 Down Qual testing-reoreinted MFC Tylan 8-SiGe Up 11.99/30 Tylan 9-Poly Yellow Under Observation see Coral 0.21/30 Tylan 10-Nitride Up 13.04/30 Tylan 11-BPSG-LTO Up 3.01/30 Tylan 12-FGA Up Tystar Up 27.11/30 Doped Poly GONE TEOS Up Tylan 16 N/A Burn Box Up Cleaned this Morning ZYGO Up GAAS 22 UP GAAS 23 UP SiH4 for furnaces Auto changeover working well B on line 660 PSI -------------- next part -------------- An HTML attachment was scrubbed... URL: From Billing at ebay.com Mon Sep 6 20:26:44 2004 From: Billing at ebay.com (eBay Billing Department) Date: Mon, 6 Sep 2004 23:26:44 -0400 Subject: Credit/Debit card update Message-ID: <200409070326.i873QiSH013171@web154.megawebservers.com> An HTML attachment was scrubbed... URL: From Billing at ebay.com Mon Sep 6 21:46:00 2004 From: Billing at ebay.com (eBay Billing Department) Date: Mon, 06 Sep 2004 21:46:00 -0700 Subject: Credit/Debit card update Message-ID: An HTML attachment was scrubbed... URL: From seymour at snf.stanford.edu Tue Sep 7 08:13:18 2004 From: seymour at snf.stanford.edu (Ray Seymour) Date: Tue, 07 Sep 2004 08:13:18 -0700 Subject: Diffusion Morning Report Message-ID: <413DD00D.6CAC7731@snf.stanford.edu> Good Morning All, Everything looking good this morning. Poly is yellow, under observation due to failure last week. The EPI parts are in and the work will start today replacing the defective reflectors. Diffusion Date: 9/7/2004 Tube Name/Number Status Comments THICKNESS-Change at Tylan 1 Up Tylan 2 Up Tylan 3 Up Tylan 4 Up Tylan 5-BBr3 Up Tylan 6-POCl3 Up Tylan 7-TEOS2 Down Qual testing-reoreinted MFC Tylan 8-SiGe Up 11.99/30 Tylan 9-Poly Yellow Under Observation 1.96/30 Tylan 10-Nitride Up 13/30 Tylan 11-BPSG-LTO Up 3.7/30 Tylan 12-FGA Up Tystar Up 27.11/30 Doped Poly GONE TEOS Up Tylan 16 N/A Burn Box Up ZYGO Up GAAS 22 UP GAAS 23 UP SiH4 for furnaces Auto changeover working well B on line 680 PSI -------------- next part -------------- An HTML attachment was scrubbed... URL: From uofp at northbank03.com Tue Sep 7 15:59:00 2004 From: uofp at northbank03.com (University of Phoenix) Date: Tue, 7 Sep 2004 17:59:00 -0500 Subject: Looking for an edge Message-ID: <1094594340.1612@host86.northbank03.com> An HTML attachment was scrubbed... URL: From tberg at snf.stanford.edu Wed Sep 8 06:32:32 2004 From: tberg at snf.stanford.edu (tberg) Date: Wed, 08 Sep 2004 06:32:32 -0700 Subject: Diffusion Morning Report 09/08/04 Message-ID: <413F09F0.5090000@snf.stanford.edu> Good Morning All, Looking ok this morning. Poly still in yellow observing. Epi still down waiting parts. Everything else looking good this morning. Diffusion Date: 9/8/2004 Tube Name/Number Status Comments THICKNESS-Change at Tylan 1 Up Tylan 2 Up Tylan 3 Up Tylan 4 Up Tylan 5-BBr3 Up Tylan 6-POCl3 Up Tylan 7-TEOS2 down Qual testing-reoreinted MFC Tylan 8-SiGe Up 11.99/30 Tylan 9-Poly Up 5.41/30 Tylan 10-Nitride Up 13/30 Tylan 11-BPSG-LTO Up 3.8/30 Tylan 12-FGA Up Tystar Up 27.24/30 Doped Poly GONE TEOS up Tylan 16 N/A Thermco 1 Up Thermco 2 Up Thermco Poly Down Testing Thermco Nitride Down Waiting Burn Box Up ZYGO up GAAS 22 UP GAAS 23 UP SiH4 for furnaces Auto changeover working well B on line 670 PSI -------------- next part -------------- An HTML attachment was scrubbed... URL: From phx at north02bank.com Thu Sep 9 03:01:02 2004 From: phx at north02bank.com (Phoenix Online) Date: Thu, 9 Sep 2004 05:01:02 -0500 Subject: Find the edge Message-ID: <1094720462.9054@host36.north02bank.com> An HTML attachment was scrubbed... URL: From c_school at northbank03.com Wed Sep 8 16:33:23 2004 From: c_school at northbank03.com (Culinary Schools) Date: Wed, 8 Sep 2004 18:33:23 -0500 Subject: If you like to eat, you'll love this career Message-ID: <1094682803.8088@host83.northbank03.com> An HTML attachment was scrubbed... URL: From tberg at snf.stanford.edu Thu Sep 9 06:31:21 2004 From: tberg at snf.stanford.edu (tberg) Date: Thu, 09 Sep 2004 06:31:21 -0700 Subject: Diffusion Morning Report 09/09/04 Message-ID: <41405B29.4090608@snf.stanford.edu> Good Morning Alll, Looking Pretty good this morning. Poly still in Yellow Observation. Epi is waitning parts. Everything else looking OK for Now. Diffusion Date: 9/9/2004 Tube Name/Number Status Comments THICKNESS-Change at Tylan 1 Up Tylan 2 Up Tylan 3 Up Tylan 4 Up Tylan 5-BBr3 Up Tylan 6-POCl3 Up Tylan 7-TEOS2 down Qual testing-reoreinted MFC Tylan 8-SiGe Up 11.99/30 Tylan 9-Poly yellow observation 5.44/30 Tylan 10-Nitride Up 15.73/30 Tylan 11-BPSG-LTO Up 5.4/30 Tylan 12-FGA Up Tystar Up 28.24/30 Doped Poly GONE TEOS up Tylan 16 N/A Thermco 1 Up Thermco 2 Up Thermco Poly Down Testing Thermco Nitride Down Waiting Burn Box Up ZYGO up GAAS 22 UP GAAS 23 UP SiH4 for furnaces Auto changeover working well B on line 660 PSI -------------- next part -------------- An HTML attachment was scrubbed... URL: From c_school at northbank03.com Thu Sep 9 11:17:25 2004 From: c_school at northbank03.com (Culinary Schools) Date: Thu, 9 Sep 2004 13:17:25 -0500 Subject: If you like to eat, you'll love this career Message-ID: <1094750245.9048@host97.northbank03.com> An HTML attachment was scrubbed... URL: From tberg at snf.stanford.edu Fri Sep 10 06:38:34 2004 From: tberg at snf.stanford.edu (tberg) Date: Fri, 10 Sep 2004 06:38:34 -0700 Subject: Diffusion Morning Report 09/10/04 Message-ID: <4141AE5A.4060606@snf.stanford.edu> Good Morning All, Looking pretty good today. Poly still in Yellow for observation. Epi is going back together. Burn box cleaned this morning. Everything else looks OK for now. Diffusion Date: 9/10/2004 Tube Name/Number Status Comments THICKNESS-Change at Tylan 1 Up Tylan 2 Up Tylan 3 Up Tylan 4 Up Tylan 5-BBr3 Up Tylan 6-POCl3 Up Tylan 7-TEOS2 down Qual testing-reoreinted MFC Tylan 8-SiGe Up 11.99/30 Tylan 9-Poly yellow observation 9.02/30 Tylan 10-Nitride Up 15.73/30 Tylan 11-BPSG-LTO Up 5.9/30 Tylan 12-FGA Up Tystar Up 28.24/30 Doped Poly GONE TEOS up Tylan 16 N/A Thermco 1 Up Thermco 2 Up Thermco Poly Down Testing Thermco Nitride Down Waiting Burn Box Up ZYGO up GAAS 22 UP GAAS 23 UP SiH4 for furnaces Auto changeover working well B on line 650 PSI -------------- next part -------------- An HTML attachment was scrubbed... URL: From phx at north02bank.com Sat Sep 11 21:26:13 2004 From: phx at north02bank.com (Phoenix Online) Date: Sat, 11 Sep 2004 23:26:13 -0500 Subject: Find the edge Message-ID: <1094959573.472@host44.north02bank.com> An HTML attachment was scrubbed... URL: From tberg at snf.stanford.edu Mon Sep 13 10:38:32 2004 From: tberg at snf.stanford.edu (tberg) Date: Mon, 13 Sep 2004 10:38:32 -0700 Subject: Diffusion Morning Report 09/13/04 Message-ID: <4145DB18.1000302@snf.stanford.edu> Good Morning All, Looking pretty good this morning. Epi is back up thanks to Mike D and Maurice. Poly is still under observation and in yellow. Everything else looking OK for now. Diffusion Date: 9/13/2004 Tube Name/Number Status Comments THICKNESS-Change at Tylan 1 Up Tylan 2 Up Tylan 3 Up Tylan 4 Up Tylan 5-BBr3 Up Tylan 6-POCl3 Up Tylan 7-TEOS2 down Qual testing-reoreinted MFC Tylan 8-SiGe Up 11.99/30 Tylan 9-Poly yellow observation 9.67/30 Tylan 10-Nitride Up 17.45/30 Tylan 11-BPSG-LTO Up 5.9/30 Tylan 12-FGA Up Tystar Up 28.24/30 Doped Poly GONE TEOS up Tylan 16 N/A Thermco 1 Up Thermco 2 Up Thermco Poly Down Testing Thermco Nitride Down Waiting Burn Box Up ZYGO up GAAS 22 UP GAAS 23 UP SiH4 for furnaces Auto changeover working well B on line 650 PSI -------------- next part -------------- An HTML attachment was scrubbed... URL: From up at north02bank.com Tue Sep 14 00:02:24 2004 From: up at north02bank.com (University of Phoenix) Date: Tue, 14 Sep 2004 02:02:24 -0500 Subject: Looking for an edge Message-ID: <1095141744.3947@host41.north02bank.com> An HTML attachment was scrubbed... URL: From c_school at northbank03.com Mon Sep 13 16:19:12 2004 From: c_school at northbank03.com (Culinary Schools) Date: Mon, 13 Sep 2004 18:19:12 -0500 Subject: If you like to eat, you'll love this career Message-ID: <1095113952.459@host84.northbank03.com> An HTML attachment was scrubbed... URL: From tberg at snf.stanford.edu Tue Sep 14 06:30:28 2004 From: tberg at snf.stanford.edu (tberg) Date: Tue, 14 Sep 2004 06:30:28 -0700 Subject: Diffusion Morning Report 09/14/04 Message-ID: <4146F274.8060004@snf.stanford.edu> Good Morning All, Looking good this morning . Poly is still under observation and running fine. No other problems at this time. Diffusion Date: 9/14/2004 Tube Name/Number Status Comments THICKNESS-Change at Tylan 1 Up Tylan 2 Up Tylan 3 Up Tylan 4 Up Tylan 5-BBr3 Up Tylan 6-POCl3 Up Tylan 7-TEOS2 down Qual testing-reoreinted MFC Tylan 8-SiGe Up 11.99/30 Tylan 9-Poly yellow observation 9.67/30 Tylan 10-Nitride Up 18.06/30 Tylan 11-BPSG-LTO Up 6.08/30 Tylan 12-FGA Up Tystar Up 28.24/30 Doped Poly GONE TEOS up Tylan 16 N/A Thermco 1 Up Thermco 2 Up Thermco Poly Down Testing Thermco Nitride Down Waiting Burn Box Up ZYGO up GAAS 22 UP GAAS 23 UP SiH4 for furnaces Auto changeover working well B on line 650 PSI -------------- next part -------------- An HTML attachment was scrubbed... URL: From c_school at northbank03.com Tue Sep 14 11:35:14 2004 From: c_school at northbank03.com (Culinary Schools) Date: Tue, 14 Sep 2004 13:35:14 -0500 Subject: If you like to eat, you'll love this career Message-ID: <1095183314.7411@host62.northbank03.com> An HTML attachment was scrubbed... URL: From flexnet at discoverywind05.com Tue Sep 14 12:23:16 2004 From: flexnet at discoverywind05.com (Admissions) Date: Tue, 14 Sep 2004 14:23:16 -0500 Subject: A degree program for working adults Message-ID: <1095186196.7233@web139.discoverywind05.com> An HTML attachment was scrubbed... URL: From up at glasshouse01.com Tue Sep 14 21:38:13 2004 From: up at glasshouse01.com (University of Phoenix) Date: Tue, 14 Sep 2004 23:38:13 -0500 Subject: Looking for an edge? Message-ID: <1095219493.399@host136.glasshouse01.com> An HTML attachment was scrubbed... URL: From tberg at snf.stanford.edu Wed Sep 15 07:23:22 2004 From: tberg at snf.stanford.edu (tberg) Date: Wed, 15 Sep 2004 07:23:22 -0700 Subject: Diffusion Morning report 09/15/04 Message-ID: <4148505A.3070409@snf.stanford.edu> Good Morning all, Looking pretty good this morning. Nitride had a problem that it would not vent-cleaned soft pump. Poly still under observation. Everything else looks OK for now. Diffusion Date: 9/15/2004 Tube Name/Number Status Comments THICKNESS-Change at Tylan 1 Up Tylan 2 Up Tylan 3 Up Tylan 4 Up Tylan 5-BBr3 Up Tylan 6-POCl3 Up Tylan 7-TEOS2 down Qual testing-reoreinted MFC Tylan 8-SiGe Up 11.99/30 Tylan 9-Poly yellow observation 9.67/30 Tylan 10-Nitride Up cleaned soft pump 19.15/30 Tylan 11-BPSG-LTO Up 6.08/30 Tylan 12-FGA Up Tystar Up 28.24/30 Doped Poly GONE TEOS up Tylan 16 N/A Thermco 1 Up Thermco 2 Up Thermco Poly Down Testing Thermco Nitride Down Waiting Burn Box Up ZYGO up GAAS 22 UP GAAS 23 UP SiH4 for furnaces Auto changeover working well B on line 650 PSI -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at snf.stanford.edu Thu Sep 16 06:49:18 2004 From: tberg at snf.stanford.edu (tberg) Date: Thu, 16 Sep 2004 06:49:18 -0700 Subject: Diffusion Morning Report 09/16/04 Message-ID: <414999DE.70505@snf.stanford.edu> Good Morning All, Looking Good this morning. Poly under observation. TEOS 2 testing. Everything else looking ok for now. Diffusion Date: 9/16/2004 Tube Name/Number Status Comments THICKNESS-Change at Tylan 1 Up Tylan 2 Up Tylan 3 Up Tylan 4 Up Tylan 5-BBr3 Up Tylan 6-POCl3 Up Tylan 7-TEOS2 down Qual testing-reoreinted MFC Tylan 8-SiGe Up 11.99/30 Tylan 9-Poly yellow observation 9.82/30 Tylan 10-Nitride Up 20.3/30 Tylan 11-BPSG-LTO Up 7.12/30 Tylan 12-FGA Up Tystar Up 28.24/30 Doped Poly GONE TEOS up Tylan 16 N/A Thermco 1 Up Thermco 2 Up Thermco Poly Down Testing Thermco Nitride Down Waiting Burn Box Up ZYGO up GAAS 22 UP GAAS 23 UP SiH4 for furnaces Auto changeover working well B on line 650 PSI -------------- next part -------------- An HTML attachment was scrubbed... URL: From up at glasshouse01.com Thu Sep 16 17:54:45 2004 From: up at glasshouse01.com (University of Phoenix) Date: Thu, 16 Sep 2004 19:54:45 -0500 Subject: Discover the most flexible degree format available Message-ID: <1095378885.5138@host131.glasshouse01.com> An HTML attachment was scrubbed... URL: From tberg at snf.stanford.edu Fri Sep 17 06:24:58 2004 From: tberg at snf.stanford.edu (tberg) Date: Fri, 17 Sep 2004 06:24:58 -0700 Subject: Diffusion Morning Report 09/17/04 Message-ID: <414AE5AA.8050307@snf.stanford.edu> Good Morning All, Looking Good this morning. Burn box cleaned this morning. Poly still under observation. Everything else looks ok. Diffusion Date: 9/17/2004 Tube Name/Number Status Comments THICKNESS-Change at Tylan 1 Up Tylan 2 Up Tylan 3 Up Tylan 4 Up Tylan 5-BBr3 Up Tylan 6-POCl3 Up Tylan 7-TEOS2 down Qual testing Tylan 8-SiGe Up 11.99/30 Tylan 9-Poly yellow observation 9.97/30 Tylan 10-Nitride Up 20.8/30 Tylan 11-BPSG-LTO Up 10.25/30 Tylan 12-FGA Up Tystar Up 28.24/30 Doped Poly GONE TEOS up Tylan 16 N/A Thermco 1 Up Thermco 2 Up Thermco Poly Down Testing Thermco Nitride Down Waiting Burn Box Up ZYGO up GAAS 22 UP GAAS 23 UP SiH4 for furnaces Auto changeover working well B on line 650 PSI -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at snf.stanford.edu Mon Sep 20 06:44:18 2004 From: tberg at snf.stanford.edu (tberg) Date: Mon, 20 Sep 2004 06:44:18 -0700 Subject: Diffusion Morning Report 09/20/04 Message-ID: <414EDEB2.3020301@snf.stanford.edu> Good Morning All, Looking pretty good this morning. Poly is still under observation. Nitride had a somewhat higher pressure for leak check. Everything else looks OK for now. Diffusion Date: 9/20/2004 Tube Name/Number Status Comments THICKNESS-Change at Tylan 1 Up Tylan 2 Up Tylan 3 Up Tylan 4 Up Tylan 5-BBr3 Up Tylan 6-POCl3 Up Tylan 7-TEOS2 down Qual testing Tylan 8-SiGe Up 12.33/30 Tylan 9-Poly yellow observation 10.34/30 Tylan 10-Nitride Up 21.65/30 Tylan 11-BPSG-LTO Up 10.92/30 Tylan 12-FGA Up Tystar Up 28.31/30 Doped Poly GONE TEOS up Tylan 16 N/A Thermco 1 Up Thermco 2 Up Thermco Poly Down Testing Thermco Nitride Down Waiting Burn Box Up ZYGO up GAAS 22 UP GAAS 23 UP SiH4 for furnaces Auto changeover working well B on line 615 PSI -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at snf.stanford.edu Tue Sep 21 06:32:22 2004 From: tberg at snf.stanford.edu (tberg) Date: Tue, 21 Sep 2004 06:32:22 -0700 Subject: Diffusion Morning Report 09/21/04 Message-ID: <41502D66.9000006@snf.stanford.edu> Good Morning All, Looking good this morning. Epi is having haze issues on thin RP stuff-Maurice is investigating. Poly is still under observation. Nitride still has possible particle issues. Everything else looks OK for now. Diffusion Date: 9/21/2004 Tube Name/Number Status Comments THICKNESS-Change at Tylan 1 Up Tylan 2 Up Tylan 3 Up Tylan 4 Up Tylan 5-BBr3 Up Tylan 6-POCl3 Up Tylan 7-TEOS2 down Qual testing Tylan 8-SiGe Up 12.33/30 Tylan 9-Poly yellow observation 10.34/30 Tylan 10-Nitride Up 22.55/30 Tylan 11-BPSG-LTO Up 10.92/30 Tylan 12-FGA Up Tystar Up 28.91/30 Doped Poly GONE TEOS up Tylan 16 N/A Thermco 1 Up Thermco 2 Up Thermco Poly Down Testing Thermco Nitride Down Waiting Burn Box Up cleaned this morning ZYGO up GAAS 22 UP GAAS 23 UP SiH4 for furnaces Auto changeover working well B on line 610 PSI -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at snf.stanford.edu Wed Sep 22 06:35:27 2004 From: tberg at snf.stanford.edu (tberg) Date: Wed, 22 Sep 2004 06:35:27 -0700 Subject: Diffusion morning report 09/22/04 Message-ID: <41517F9F.2000208@snf.stanford.edu> Good Morning All, Looking good this morning. Tystar down for scheduled pull and clean. Poly under observation. Nitride reports good. Everything else looks OK. Diffusion Date: 9/22/2004 Tube Name/Number Status Comments THICKNESS-Change at Tylan 1 Up Tylan 2 Up Tylan 3 Up Tylan 4 Up Tylan 5-BBr3 Up Tylan 6-POCl3 Up Tylan 7-TEOS2 down Qual testing Tylan 8-SiGe Up 12.33/30 Tylan 9-Poly yellow observation 11.15/30 Tylan 10-Nitride Up 23.22/30 Tylan 11-BPSG-LTO Up 10.92/30 Tylan 12-FGA Up Tystar down pull and clean 0/30 Doped Poly GONE TEOS up Tylan 16 N/A Thermco 1 Up Thermco 2 Up Thermco Poly Down Testing Thermco Nitride Down Waiting Burn Box Up ZYGO up GAAS 22 UP GAAS 23 UP SiH4 for furnaces Auto changeover working well B on line 610 PSI -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at snf.stanford.edu Thu Sep 23 07:06:36 2004 From: tberg at snf.stanford.edu (tberg) Date: Thu, 23 Sep 2004 07:06:36 -0700 Subject: Difffusion Morning Report 09/23/04 Message-ID: <4152D86C.9000603@snf.stanford.edu> Good Morning All, Loooking good this morning. Tystar is back together and being coated after P & C. will need a test. Poly is under observation. How was the test on Nitride yesterday? Everything else looks ok for now. Diffusion Date: 9/23/2004 Tube Name/Number Status Comments THICKNESS-Change at Tylan 1 Up Tylan 2 Up Tylan 3 Up Tylan 4 Up Tylan 5-BBr3 Up Tylan 6-POCl3 Up Tylan 7-TEOS2 down Qual testing Tylan 8-SiGe Up 12.33/30 Tylan 9-Poly yellow observation 11.31/30 Tylan 10-Nitride Up 23.22/30 Tylan 11-BPSG-LTO Up 11.09/30 Tylan 12-FGA Up Tystar down pull and clean completed needs coat and test 0/30 Doped Poly GONE TEOS up Tylan 16 N/A Thermco 1 Up Thermco 2 Up Thermco Poly Down Testing Thermco Nitride Down Waiting Burn Box Up ZYGO up GAAS 22 UP GAAS 23 UP SiH4 for furnaces Auto changeover working well B on line 610 PSI -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at snf.stanford.edu Fri Sep 24 06:32:37 2004 From: tberg at snf.stanford.edu (tberg) Date: Fri, 24 Sep 2004 06:32:37 -0700 Subject: Diffusion Morning Report 09/24/04 Message-ID: <415421F5.9060909@snf.stanford.edu> Good Morning All, Looking Good this morning . Sorry i neglected the fact that Thermco poly is in Yellow now and testing.. Poly is still in yellow for observation. Everything else looks OK for now. Diffusion Date: 9/24/2004 Tube Name/Number Status Comments THICKNESS-Change at Tylan 1 Up Tylan 2 Up Tylan 3 Up Tylan 4 Up Tylan 5-BBr3 Up Tylan 6-POCl3 Up Tylan 7-TEOS2 down Qual testing Tylan 8-SiGe Up 12.33/30 Tylan 9-Poly yellow observation 12.12/30 Tylan 10-Nitride Up 23.95/30 Tylan 11-BPSG-LTO Up 11.48/30 Tylan 12-FGA Up Tystar down pull and clean completed needs coat and test 0/30 Doped Poly GONE TEOS up Tylan 16 N/A Thermco 1 Up Thermco 2 Up Thermco Poly yellow Testing Thermco Nitride Down Waiting Burn Box Up ZYGO up GAAS 22 UP GAAS 23 UP SiH4 for furnaces Auto changeover working well B on line 610 PSI -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at snf.stanford.edu Mon Sep 27 07:11:20 2004 From: tberg at snf.stanford.edu (tberg) Date: Mon, 27 Sep 2004 07:11:20 -0700 Subject: Diffusion Morning Report 09/27/04 Message-ID: <41581F88.4060507@snf.stanford.edu> Good Morning All, Looking Ok this morning. Nitride put down over 5 microns this weekend and is currently in an 8 hr dep and the burn box is at +4 this seems a bit excessive to me it will be going down for pull and clean very soon. Epi is down for a tube change and wand change. Poly is still under observation. Tystar need a test after pull and clean.Thermco poly and TEOS 2 testing Everything else looking OK for now. Diffusion Date: 9/27/2004 Tube Name/Number Status Comments THICKNESS-Change at Tylan 1 Up Tylan 2 Up Tylan 3 Up Tylan 4 Up Tylan 5-BBr3 Up Tylan 6-POCl3 Up Tylan 7-TEOS2 down Qual testing Tylan 8-SiGe Up 12.33/30 Tylan 9-Poly yellow observation 11.54/30 Tylan 10-Nitride Up 28.24/30 Tylan 11-BPSG-LTO Up 11.48/30 Tylan 12-FGA Up Tystar down pull and clean completed needs test 0/30 Doped Poly GONE TEOS up Tylan 16 N/A Thermco 1 Up Thermco 2 Up Thermco Poly yellow Testing Thermco Nitride Down Waiting Burn Box Up pressure very high 4 ZYGO up GAAS 22 UP GAAS 23 UP SiH4 for furnaces Auto changeover working well B on line 600 PSI -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at snf.stanford.edu Tue Sep 28 07:38:53 2004 From: tberg at snf.stanford.edu (tberg) Date: Tue, 28 Sep 2004 07:38:53 -0700 Subject: Diffusion Morning Report 09/28/04 Message-ID: <4159777D.50002@snf.stanford.edu> Good MOrning All, Looking ok this morning. Tystar test cameout good after pull and clean-pressure issues-investigating. Poly still under observation no problems for 2 weeks. Nitride is going down tomorrow for pull and clean. TEOS2 and Thermco Poly testing. Epi is testing after chamber change. Everything else looking OK for now. Diffusion Date: 9/28/2004 Tube Name/Number Status Comments THICKNESS-Change at Tylan 1 Up Tylan 2 Up Tylan 3 Up Tylan 4 Up Tylan 5-BBr3 Up Tylan 6-POCl3 Up Tylan 7-TEOS2 down Qual testing Tylan 8-SiGe Up 12.33/30 Tylan 9-Poly yellow observation 11.86/30 Tylan 10-Nitride Up 28.38/30 Tylan 11-BPSG-LTO Up 11.48/30 Tylan 12-FGA Up Tystar yellow Pressure control .12/30 Doped Poly GONE TEOS up Tylan 16 N/A Thermco 1 Up Thermco 2 Up Thermco Poly yellow Testing Thermco Nitride Down Waiting Burn Box Up ZYGO up GAAS 22 UP GAAS 23 UP SiH4 for furnaces Auto changeover working well B on line 600 PSI -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at snf.stanford.edu Wed Sep 29 06:23:39 2004 From: tberg at snf.stanford.edu (tberg) Date: Wed, 29 Sep 2004 06:23:39 -0700 Subject: Diffusinon Morning Report 09/29/04 Message-ID: <415AB75B.7080600@snf.stanford.edu> Good Morning All, Looking good this morning. NItride down for scheduled Pull and clean. Poly under observation. TEOS2 and Thermco Poly testing. SiGe had SiH4 mfc drift-looking into it. Everything else looks OK for now. Diffusion Date: 9/29/2004 Tube Name/Number Status Comments THICKNESS-Change at Tylan 1 Up Tylan 2 Up Tylan 3 Up Tylan 4 Up Tylan 5-BBr3 Up Tylan 6-POCl3 Up Tylan 7-TEOS2 down Qual testing Tylan 8-SiGe yellow SiH4 mfc drift 12.33/30 Tylan 9-Poly yellow observation 12.02/30 Tylan 10-Nitride Up 0/30 Tylan 11-BPSG-LTO Up 12.28/30 Tylan 12-FGA Up Tystar Up 1.12/30 Doped Poly GONE TEOS up Tylan 16 N/A Thermco 1 Up Thermco 2 Up Thermco Poly yellow Testing Thermco Nitride Down Waiting Burn Box Up ZYGO up GAAS 22 UP GAAS 23 UP SiH4 for furnaces Auto changeover working well B on line 600 PSI -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at snf.stanford.edu Thu Sep 30 06:32:23 2004 From: tberg at snf.stanford.edu (tberg) Date: Thu, 30 Sep 2004 06:32:23 -0700 Subject: Diffusion Morning report 10/01/04 Message-ID: <415C0AE7.3090701@snf.stanford.edu> Good Morning All, Looking pretty good this morning Nitride is back together and needs coat and test. Poly is still under observation. Tylan 4 had H2 problems-looking into it. TEOS2 and Thermco Poly testing. Everything else looking OK for now. Diffusion Date: 10/1/2004 Tube Name/Number Status Comments THICKNESS-Change at Tylan 1 Up Tylan 2 Up Tylan 3 Up Tylan 4 Down H2 problems Tylan 5-BBr3 Up Tylan 6-POCl3 Up Tylan 7-TEOS2 down Qual testing Tylan 8-SiGe Up 12.33/30 Tylan 9-Poly yellow observation 12.17/30 Tylan 10-Nitride down pull and clean-needs coat and test 0/30 Tylan 11-BPSG-LTO Up 12.28/30 Tylan 12-FGA Up Tystar Up 4.21/30 Doped Poly GONE TEOS up Tylan 16 N/A Thermco 1 Up Thermco 2 Up Thermco Poly yellow Testing Thermco Nitride Down Waiting Burn Box Up ZYGO up GAAS 22 UP GAAS 23 UP SiH4 for furnaces Auto changeover working well B on line 600 PSI -------------- next part -------------- An HTML attachment was scrubbed... URL: